A broadband substrate integrated cavity (SIC) antenna array based on high-order mode is proposed for low-temperature cofired ceramic (LTCC) integrated systems in W-band. To improve the gain of antenna element, a large SIC is adopted to work in high-order mode, which also avoid using excessive vias and reduce the process complexity. Two parasitic patches are loaded on the high-order mode SIC to remove the reverse E-field in the open aperture, leading to a high-gain broadside radiation. The high-order-mode SIC antenna element is fed by high-order TE 20 -mode substrate integrated waveguide (SIW), rather than regular TE 10 -mode SIW. The simplified feeding network with TE 20 -mode SIW is also designed with wideband performance, further enhancing the fabrication robustness of antenna array. To validate the proposed high-order mode-based antenna element and feeding network, a W-band 2 � 4 antenna array is designed as an example using LTCC technology. The measured return loss is better than 10 dB from 81.1 to 98.1 GHz (19% bandwidth) with a maximum gain of 18.3 dB at 94 GHz. The proposed antenna array has great potential in millimetre-wave and terahertz LTCC integrated applications.