Abstract:We present a novel micromachining approach for on chip three-axis capacitive high aspect ratio acceleration sensors made from standard silicon wafers. The patented AIM (air gap insulated microstructures) technology with their excellent device properties regarding temperature behavior, capacitive sensitivity and reliability was modified for enabling out-of-plane differential measurements. Therefore electrodes with different heights have been patterned by using one additional masking layer. Using the presented A… Show more
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