A Novel Surface Recovery Algorithm for Dual Wavelength White LED in Vertical Scanning Interferometry (VSI)

Zhu, Linlin; Dong, Yuchu; Li, Zexiao; Zhang, Xiaodong

doi:10.3390/s20185225

Cited by 10 publications

(6 citation statements)

References 25 publications

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“…A wideband light source is used in WLI microscopy [43][44][45]. The principle and schematic diagram of a white light interferometer (WLI) system [46], is shown in Fig. 14.…”

Section: Optical Measurement Techniquesmentioning

confidence: 99%

See 1 more Smart Citation

Surface Characteristics Measurement Using Computer Vision: A Review

Hashmi¹,

Mali²,

Meena³

et al. 2023

Computer Modeling in Engineering &Amp; Sciences

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Computer vision provides image-based solutions to inspect and investigate the quality of the surface to be measured. For any components to execute their intended functions and operations, surface quality is considered equally significant to dimensional quality. Surface Roughness (Ra) is a widely recognized measure to evaluate and investigate the surface quality of machined parts. Various conventional methods and approaches to measure the surface roughness are not feasible and appropriate in industries claiming 100% inspection and examination because of the time and efforts involved in performing the measurement. However, Machine vision has emerged as the innovative approach to executing the surface roughness measurement. It can provide economic, automated, quick, and reliable solutions. This paper discusses the characterization of the surface texture of surfaces of traditional or non-traditional manufactured parts through a computer/machine vision approach and assessment of the surface characteristics, i.e., surface roughness, waviness, flatness, surface texture, etc., machine vision parameters. This paper will also discuss multiple machine vision techniques for different manufacturing processes to perform the surface characterization measurement.

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“…A wideband light source is used in WLI microscopy [43][44][45]. The principle and schematic diagram of a white light interferometer (WLI) system [46], is shown in Fig. 14.…”

Section: Optical Measurement Techniquesmentioning

confidence: 99%

“…Figure 14: (a) The schematic of the white light scanning interferometry (WLSI) setup and interference data of dual-wavelength white light emitting diodes (LEDs) (b) Interferogram; (c) Interference signal[46] …”

mentioning

confidence: 99%

Surface Characteristics Measurement Using Computer Vision: A Review

Hashmi¹,

Mali²,

Meena³

et al. 2023

Computer Modeling in Engineering &Amp; Sciences

View full text Add to dashboard Cite

show abstract

“…White light Scanning interferometry (WLSI) is a well-established method for non-contact optical topography measurement [1][2][3] . WLSI uses a white light source with a broad spectrum and short coherence length to measure the threedimensional (3D) morphology without 2π-ambiguity 4 .…”

Section: Introductionmentioning

confidence: 99%

Bat-wing elimination algorithm based on the CNN in white-light interferometry

Li,

Liang,

Yang

2023

Optical Metrology and Inspection for Industrial Applications X

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White Light Scanning Interferometry (WLSI) is a mature and key method of non-contact three-dimensional (3D) morphometry. However, bat-wing is an inherent problem with WLSI, introducing systematic errors to the measurement results. In this paper, we proposed a filtering algorithm based on the convolutional neural networks (CNN) to solve the problem. A 450 nm standard step is tested to verify the effectiveness of the algorithm. The results show that the method can effectively suppress the batwing effect.

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“…Furthermore, to make quantitative measurements, it is essential to balance material dispersion in a white light interferometer along with an unambiguous reference to an absolute zero path difference which is difficult with conventional designs. The zero path delay position is an essential reference of an interferometer and is usually estimated using time domain analysis such as envelope’s amplitude method using white light interferograms 15 .…”

Section: Introductionmentioning

confidence: 99%

Ultrathin picoscale white light interferometer

Dahiya

Tyagi

Mandal

et al. 2022

Sci Rep

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White light interferometry is a well established technique with diverse precision applications, however, the conventional interferometers such as Michelson, Mach-Zehnder or Linnik are large in size, demand tedious alignment for obtaining white light fringes, require noise-isolation techniques to achieve sub-nanometric stability and importantly, exhibit unbalanced dispersion causing uncertainty in absolute zero delay reference. Here, we demonstrate an ultrathin white light interferometer enabling picometer resolution by exploiting the wavefront division of a broadband incoherent light beam after transmission through a pair of micrometer thin identical glass plates. Spatial overlap between the two diffracted split wavefronts readily produce high-contrast and stable white light fringes, with unambiguous reference to absolute zero path-delay position. The colored fringes evolve when one of the ultrathin plates is rotated to tune the interferometer with picometric resolution over tens of μm range. Our theoretical analysis validates formation of fringes and highlights self-calibration of the interferometer for picoscale measurements. We demonstrate measurement of coherence length of several broadband incoherent sources as small as a few micrometer with picoscale resolution. Furthermore, we propose a versatile double-pass configuration using the ultrathin interferometer enabling a sample cavity for additional applications in probing dynamical properties of matter.

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A Novel Surface Recovery Algorithm for Dual Wavelength White LED in Vertical Scanning Interferometry (VSI)

Cited by 10 publications

References 25 publications

Surface Characteristics Measurement Using Computer Vision: A Review

Surface Characteristics Measurement Using Computer Vision: A Review

Bat-wing elimination algorithm based on the CNN in white-light interferometry

Ultrathin picoscale white light interferometer

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