A Novel Quadrature Signal Estimation Method for a Planar Capacitive Incremental Displacement Sensor

Yu, Jie‐Hui; Wang, Wen; Li, Xin; Zhou, Zhao-Zhong

doi:10.1515/msr-2016-0015

Cited by 5 publications

(5 citation statements)

References 17 publications

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“…In a proposed phase shift arctangent (PSA), quadrature signal estimation method for a planar capacitive incremental displacement sensor, electrode width was set as four-times the gap distance to increase measuring sensitivity [ 15 ]. Experiment results indicated that the effects of static errors and dynamic disturbances have been mostly removed, however, waveform deformation errors remained.…”

Section: Sensor Model Against Fringe Effectsmentioning

confidence: 99%

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Novel EMD-Based Extraction Approach of Electric Field Fringe Impacts on a Micro Capacitive Displacement Sensor

2018

Micromachines

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This paper presents an EMD (empirical mode decomposition)-based extraction approach to decouple the electric field fringe component impacts on the nonlinearity errors of a micro encoder-like capacitive displacement sensor. A calculated capacitance model built under Maxwell’s equations against the impacts of electric field fringe component indicates that signals of this sensor are all in periodic co-sinusoidal waveforms. Applying the proposed EMD scheme, signals are decomposed into sets of intrinsic mode functions (IMFs) and a residual, in which a fundamental component represents all the features of sensor signal and reserves the local information. Interpreting sensor information from the extracted component instead of the original signal drastically diminishes the impacts of electric field fringe effect. Results from a test bench shows that after applying the EMD-based extraction approach, waveform errors were decreased from over 4.18% to less than 0.89%. Nonlinearity of the interpreted displacement was decreased from 1.54% to 0.29% for 8 mm stroke.

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Section: Sensor Model Against Fringe Effectsmentioning

confidence: 99%

“…The X - Y displacement information as D X and D Y are obtained by a particular arctangent function as shown in Equations (11) and (12). Effects of some inevitable roll, yaw, and pitch angular errors would be well balanced [ 5 , 15 , 16 ].…”

Section: Sensor Model Against Fringe Effectsmentioning

confidence: 99%

Novel EMD-Based Extraction Approach of Electric Field Fringe Impacts on a Micro Capacitive Displacement Sensor

2018

Micromachines

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“…The resolution of the system is 0.308 µm [14]. Subsequently, the team also proposed a novel phase-shifting arctangent interpolation method to improve the measurement efficiency of the planar capacitive sensor, which can reduce the waveform error from 4% to 1.72% [15]. Capacitive displacement sensors can achieve µmor even nm-level measurement accuracy in a small measurement range, but the dielectric constant between its two electrodes is easily affected by environmental factors, so capacitive sensors are not suitable for use in harsh environments.…”

Section: Introductionmentioning

confidence: 99%

A New 2D Displacement Measurement Method Based on an Eddy Current Sensor and Absolute Encoding

Yang

Zhang

et al. 2022

Machines

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A new method of two-dimensional (2D) plane displacement measurement based on an eddy current sensor is proposed in this paper. A series of grooves with different widths and depths are graved on the linear displacement table to form 2D absolute coding using the idea of pseudorandom coding. The eddy current sensor array is arranged above the groove to identify the coding. An artificial neural network is used to establish a measurement model which is the mapping relationship between the output of the eddy current sensor array and the 2D displacement of the workbench. A feasibility experiment showed that in the range of 20 × 20 mm, the root mean square error of measurement in the X- and Y-directions are 83 and 73 μm, respectively. The new method integrates eddy current sensor and artificial neural network modeling to realize 2D displacement measurement, which provides a new solution for displacement and angle measurement.

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“…The equivalent displacement error caused by fringe effects was 237 µm, and the equivalent displacement interpretation error was 141 µm. Moreover, a novel phase-shift arctangent interpolation method was utilized to decrease waveform errors from 4% to 1.72% [17]. A planar position sensor based on mono sensing electrode and hybrid-frequency excitation was proposed in [18].…”

Section: Introductionmentioning

confidence: 99%

An Inductive Sensor for Two-Dimensional Displacement Measurement

Zhong

et al. 2020

Sensors

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The simultaneous and independent measurements of two-dimensional (2D) displacements are significant for 2D positioning. Here a planar inductive sensor which is based on the principle of electromagnetic induction is proposed. The sensor is composed of a primary coil and a secondary coil. The primary coil consists of an array of planar spiral coils which are arranged as an m × n matrix. The primary coil is supplied with 4 kHz alternating current to generate an array of pulsating magnetic field. The secondary coil contains four spiral coils which are arranged as a 2 × 2 matrix. Thereby, four roads of modulated signals whose amplitudes vary with displacements of the secondary coil along x- and y-axis are induced. An algorithm based on the Coordinate Rotation Digital Computer algorithm is introduced to resolve the planar displacements. The structure and working principle of the sensor are proposed firstly. Then, the finite element analysis of the electromagnetic model and the numerical simulation of the algorithm are given. An experiment has been performed on a sensor prototype and the results show that the proposed scheme is feasible. Measurement error analysis of the sensor has been pursued at the end of the paper.

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A Novel Quadrature Signal Estimation Method for a Planar Capacitive Incremental Displacement Sensor

Cited by 5 publications

References 17 publications

Novel EMD-Based Extraction Approach of Electric Field Fringe Impacts on a Micro Capacitive Displacement Sensor

Novel EMD-Based Extraction Approach of Electric Field Fringe Impacts on a Micro Capacitive Displacement Sensor

A New 2D Displacement Measurement Method Based on an Eddy Current Sensor and Absolute Encoding

An Inductive Sensor for Two-Dimensional Displacement Measurement

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