A novel micromachined Fabry-Perot interferometer integrating nano-holes and dielectrophoresis for enhanced biochemical sensing

Tu, Long; Huang, Liang; Wang, Wenhui

doi:10.1016/j.bios.2018.12.013

Cited by 16 publications

(7 citation statements)

References 34 publications

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“…This value also relates to the minimum detectable change of sample properties. (iii) Figure of merit (FoM) is the ratio of sensitivity over FWHM [25]. The FoM is proportional to Q-factor [24,26].…”

Section: Analysis For Refractive Index Sensing Field Distributiomentioning

confidence: 99%

Analysis of Open Grating-Based Fabry–Pérot Resonance Structures With Potential Applications for Ultrasensitive Refractive Index Sensing

2021

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We report a theoretical framework to explain the characteristics of Fabry-Pérot (FP) resonances excited in a thin film-based grating consisting of a thin gold layer and a rectangular dielectric grating in the sub-wavelength and near-wavelength grating regimes. The zeroth-order diffraction inside the grating layer forms an FP resonant cavity with effective refractive index arising from an averaging effect between the refractive indices of the grating material and the filling material between the grating grooves. A simplified model based on Fresnel equations and phase matching condition is proposed to predict the FP resonant mode for the grating structure, this is compared with rigorous coupled-wave analysis to determine its range of validity. We also compare the performance of the proposed structure with other thin film-based interferometers for refractive index sensing applications, in terms of, sensitivity, full width at half maximum, figure of merit and dynamic range. The proposed structure has a full width at half maximum around 10 times to 60 times narrower than conventional surface plasmon resonance and conventional FP resonators. Thus, the figure of merit is higher than Kretschmann based surface plasmon resonance and FP structures by a factor of 20 and 2 respectively with a wider dynamic range. The total energy stored in the grating resonant cavity is 5 and 20-fold greater than the surface plasmon resonance configuration and the conventional FP structures. Since the resonator discussed here is an open structure, it is far better suited for liquid sensing compared to a closed FP structure.

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Section: Analysis For Refractive Index Sensing Field Distributiomentioning

confidence: 99%

Analysis of Open Grating-Based Fabry–Pérot Resonance Structures With Potential Applications for Ultrasensitive Refractive Index Sensing

2021

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“…There have been efforts to develop optical biosensors utilizing the simple structure of FPI to have characteristics such as an easy fabrication process, simple test setup, and cost-effectiveness [ 35 , 36 , 37 , 38 , 39 , 40 , 41 , 42 , 43 , 44 , 45 , 46 , 47 , 48 , 49 , 50 ]. For example, You et al developed a microfluidic enhanced FPI-based biosensor to detect glucose, sodium chloride (NaCl), and potassium chloride (KCl) for diabetes patients [ 37 ].…”

Section: Fabry-perot Interferometer (Fpi)-based Biosensorsmentioning

confidence: 99%

“…Some researchers have tried to modify the FPI structure to further enhance the sensitivity of the FPI-based biosensor. For example, Tu et al reported a micromachined-FPI (μFPI) with a perforated gold layer with nanohole arrays on a reflecting surface to increase the sensing surface area as shown in Figure 3 a [ 43 ]. The nanohole arrays have a diameter of 200 nm and a period of 500 nm fabricated using focused ion beam (FIB) milling.…”

Section: Fabry-perot Interferometer (Fpi)-based Biosensorsmentioning

confidence: 99%

Label-Free Optical Resonator-Based Biosensors

Rho

Breaux

Kim

2020

Sensors

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The demand for biosensor technology has grown drastically over the last few decades, mainly in disease diagnosis, drug development, and environmental health and safety. Optical resonator-based biosensors have been widely exploited to achieve highly sensitive, rapid, and label-free detection of biological analytes. The advancements in microfluidic and micro/nanofabrication technologies allow them to be miniaturized and simultaneously detect various analytes in a small sample volume. By virtue of these advantages and advancements, the optical resonator-based biosensor is considered a promising platform not only for general medical diagnostics but also for point-of-care applications. This review aims to provide an overview of recent progresses in label-free optical resonator-based biosensors published mostly over the last 5 years. We categorized them into Fabry-Perot interferometer-based and whispering gallery mode-based biosensors. The principles behind each biosensor are concisely introduced, and recent progresses in configurations, materials, test setup, and light confinement methods are described. Finally, the current challenges and future research topics of the optical resonator-based biosensor are discussed.

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“…To solve this issue, dielectrophoresis (DEP) technique has already been combined with plasmonic devices. A sensor consists of a Au thin film as the top electrode and a Au thin film fabricated with nanohole arrays as the bottom electrode, and it uses DEP to transport biomolecules [143]. In Figure 11a, a nanohole (200 nm in diameter) array in 100 nm thick Au film is used as the lower electrode and the upper Au electrode has a thickness of 20 nm.…”

Section: Hybridization With Electric Conductivitymentioning

confidence: 99%

Section: Figurementioning

confidence: 99%

Plasmonics for Biosensing

2019

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Techniques based on plasmonic resonance can provide label-free, signal enhanced, and real-time sensing means for bioparticles and bioprocesses at the molecular level. With the development in nanofabrication and material science, plasmonics based on synthesized nanoparticles and manufactured nano-patterns in thin films have been prosperously explored. In this short review, resonance modes, materials, and hybrid functions by simultaneously using electrical conductivity for plasmonic biosensing techniques are exclusively reviewed for designs containing nanovoids in thin films. This type of plasmonic biosensors provide prominent potential to achieve integrated lab-on-a-chip which is capable of transporting and detecting minute of multiple bio-analytes with extremely high sensitivity, selectivity, multi-channel and dynamic monitoring for the next generation of point-of-care devices.

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A novel micromachined Fabry-Perot interferometer integrating nano-holes and dielectrophoresis for enhanced biochemical sensing

Cited by 16 publications

References 34 publications

Analysis of Open Grating-Based Fabry–Pérot Resonance Structures With Potential Applications for Ultrasensitive Refractive Index Sensing

Analysis of Open Grating-Based Fabry–Pérot Resonance Structures With Potential Applications for Ultrasensitive Refractive Index Sensing

Label-Free Optical Resonator-Based Biosensors

Plasmonics for Biosensing

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