A novel microelectronic gas sensor utilizing carbon nanotubes for hydrogen gas detection

Wong, Y.M.; Kang, W.P.; Davidson, J.L.; Wisitsoraat, Anurat; Soh, K.L.

doi:10.1016/s0925-4005(03)00213-2

Cited by 208 publications

(76 citation statements)

References 27 publications

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“…Modulation of the Schottky barrier contacts by H 2 has already been demonstrated for CNTs [19] and Wong et al reported a Schottky barrier-based CNT H 2 sensor, but it achieved a sensitivity several orders of magnitude lower than bulk sensors [20]. The NW sensor reported here achieves a drift limited LOD of only 5 ppm and a sensitivity significantly exceeding that of nanosensors and several recently reported bulk diode designs [21][22][23].…”

Section: Introductionmentioning

confidence: 70%

Palladium/silicon nanowire Schottky barrier-based hydrogen sensors

Skucha

Fan

Jeon

et al. 2010

Sensors and Actuators B: Chemical

132

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a b s t r a c tThis work presents the design, fabrication, and characterization of a hydrogen sensor based on a palladium/nanowire Schottky barrier field-effect transistor that operates at room temperature. The fabricated sensor consists of boron-doped silicon nanowire arrays that are contact printed on top of a SiO 2 /Si substrate with subsequently evaporated Pd contacts. The fabrication process is compatible with post-CMOS and plastic substrate integration as it can be completed at temperatures below 150• C with good yield and repeatability. The sensor can reliably and reversibly detect H 2 concentrations in the range from 3 ppm to 5% and has a sensitivity of 6.9%/ppm at 1000 ppm. A response distinguishable from drift and noise is produced in less than 5 s for H 2 concentrations over 1000 ppm and less than 30 s for concentrations over 100 ppm. The sensor settles to 90% of the final signal value in about 1 h at lower concentrations and less than 1 min at 10,000 ppm H 2 . Drift over an 87-h measurement period is below 5 ppm H 2 concentration.

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Section: Introductionmentioning

confidence: 70%

Palladium/silicon nanowire Schottky barrier-based hydrogen sensors

Skucha

Fan

Jeon

et al. 2010

Sensors and Actuators B: Chemical

132

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“…132 The sensor has high sensitivity to hydrogen over a wide temperature range (from room temperature to 170 C). 177 CNT based strain and pressure sensors can be used for strain and pressure measurements in manufacturing industry. For example, in aircraft manufacturing, strain measurement of the skin of aircraft is critical.…”

Section: Manufacturing Industrymentioning

confidence: 99%

Carbon Nanotube-Based Sensors

Sinha¹,

Ma²,

Yeow³

2006

j nanosci nanotechnol

459

230

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Sensors continue to make significant impact in everyday life. There has been a strong demand for producing highly selective, sensitive, responsive, and cost effective sensors. As a result, research emphasis is on developing new sensing materials and technologies. Carbon nanotubes (CNTs) have many distinct properties that may be exploited to develop next generation of sensors. This manuscript reviews the distinct physical, electronic, and mechanical properties of CNTs. The main thrust of this review is to highlight the present and future research and development work in the area of carbon nanotube sensors for real-world applications. The technical challenges associated with CNT-based sensors, which remain to be fully addressed, have also been outlined at the end of the manuscript. This review aims to act as a reference source for researchers to help them in developing new applications of CNT-based sensors.

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“…Hydrogen gas nanosensors are used in manufacturing industry for hydrogen monitoring and control for petroleum transformation, welding, rocket engines, and fuel cells [24].…”

Section: Cnt-and Gnr-based Sensorsmentioning

confidence: 99%

Simulation of Fundamental Properties of CNT- and GNR-Metal Interconnects for Development of New Nanosensor Systems

Shunin¹,

Zhukovskii

Burlutskaya³

et al. 2012

NATO Science for Peace and Security Series B: Physics and Biophysics

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Cluster approach based on the multiple scattering theory formalism, realistic analytical and coherent potentials, as well as effective medium approximation (EMA-CPA), can be effectively used for nano-sized systems modeling. Major attention is paid now to applications of carbon nanotubes (CNTs) and graphene nanoribbons (GNRs) with various morphology which possess unique physical properties in nanoelectronics, e.g., contacts of CNTs or (GNRs) with other conducting elements of a nanocircuit, which can be promising candidates for interconnects in high-speed electronics. The main problems solving for resistance C-Me junctions with metal particles appear due to the influence of chirality effects in the interconnects of single-wall (SW) and multi-wall (MW) CNTs, single-layer (SL) and multi-layer (ML) GNRs with the fitting metals (Me ¼ Ni, Cu, Ag, Pd, Pt, Au) for the predefined carbon system geometry. Using the models of 'liquid metal' and 'effective bonds' developed in the framework of the presented approach and Landauer theory, we can predict resistivity properties for the considered interconnects. We have also developed the model of the inter-wall interaction inside MW CNTs, which demonstrates possible 'radial current' losses. CNT-and GNR-Metal interconnects in FET-type nanodevices provide nanosensoring possibilities for local physical (mechanical), chemical and biochemical influences of external medium. At the same time, due to high

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A novel microelectronic gas sensor utilizing carbon nanotubes for hydrogen gas detection

Cited by 208 publications

References 27 publications

Palladium/silicon nanowire Schottky barrier-based hydrogen sensors

Palladium/silicon nanowire Schottky barrier-based hydrogen sensors

Carbon Nanotube-Based Sensors

Simulation of Fundamental Properties of CNT- and GNR-Metal Interconnects for Development of New Nanosensor Systems

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