A novel method to overcome photoresist collapse with high aspect ratio structures

Yu, Miao; Zhao, Shirui; Gao, Chunqing; Guo, Xiaolong; Xu, Xinwei; Shi, Yunbo; Jing, Yupeng; Chen, Baoqin

doi:10.1007/s00542-013-1903-z

Cited by 1 publication

(1 citation statement)

References 8 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…One such problem is the collapse of nanostructures due to capillary interactions during evaporation of cleaning solutions, a process that is exacerbated by increasing miniaturization of semiconductor devices and consequent weakening of nanostructures. − The collapse of nanostructures destroys their expected functions, so countermeasures are essential. To solve this problem, new drying techniques to prevent collapse have been developed, such as the addition of an auxiliary substrate, the use of a liquid with a low surface tension to control the wettability of the substrate, , the reduction of capillary forces by electromagnetic-wave irradiation, or the elimination of capillary forces by drying without the involvement of a liquid phase through sublimation or supercriticality. , However, no effective solution has yet been established, and this problem might be one factor that makes it impossible to maintain Moore’s law.…”

Section: Introductionmentioning

confidence: 99%

Liquid-Cell Transmission Electron Microscopy Observation of Two-Step Collapse Dynamics of Silicon Nanopillars on Evaporation of Propan-2-ol: Implications for Semiconductor Integration Density

Sasaki

Yamazaki

Kimura

2022

ACS Appl. Nano Mater.

View full text Add to dashboard Cite

Miniaturization of semiconductor devices has made structures more fragile, leading to potential collapses due to capillary forces during drying after wet cleaning. This has hampered the integration of transistors according to Moore's law. We have developed a method for preparing nanopillars in a liquid cell and have successfully observed their collapse by means of a crosssectional view in transmission electron microscopy. The dynamics of collapse as a result of capillary interactions involve two steps. First, the nanopillars collapse due to an imbalance in capillary forces caused by a difference in liquid levels at the gas−liquid interface. Second, a liquid pool formed between nanopillars maintains the collapsed state of the nanopillars through surface tension. The nanopillars recover on reimmersion in the liquid after the collapse. This method is effective, and is expected to contribute to the continued development of miniaturization and three-dimensionality of semiconductors.

show abstract