A novel method measuring orifice conductance and testing time-of-flight mass spectrometer for water vapor–binary gas

Abstract

The miniature time-of-flight mass spectrometer (TOF-MS) is a crucial instrument for detecting water ice in Chinese Lunar Exploration Program (CLEP), so it is necessary to compare its detection results for pure water vapor and water vapor-binary gas (such as H2O-N2, H2O-CH4, and H2O-Ar) to evaluate its water detection performance. The throughput must be calculated using the measured conductance to test the miniature TOF-MS. According to the VΔp method, the pΔt method, whose uncertainty is less than 14.2%, is proposed to measure orifice conductance for water vapor-binary gas, and an apparatus was developed based on those two methods. The orifice conductance of four kinds of pure gases (N2, H2O, CH4, and Ar) was measured using those two methods separately, and the measurement results allowed to calculate the conductance of the water vapor-binary gas through the Equivalent Single Gas method. The conductance of the water vapor-binary gas was measured using the pΔt method, and the difference between the calculated and measured results is less than 7%. Hence, the measured conductance allows the miniature TOF-MS to be tested for the water vapor-binary gas. As throughput is from 10-9 to 10-6 Pa m3 s-1, the difference between the test signals of water vapor-binary gas and pure water vapor is less than 40%.