A Novel MEMS Microheater Based Alcohol Gas Sensor using Nanoparticles

Selvakumar, V. S.; Sujatha, L.; Sundar, R.

doi:10.5573/jsts.2018.18.4.445

Cited by 8 publications

(3 citation statements)

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“…Recent studies have reported as an alternative to laser-based gas sensors IR quasi-monochromatic sources that use “perfect” absorbers based on metamaterial [ 20 , 21 , 22 , 23 , 24 , 29 , 30 ]. The advantage of this type of IR source is the wavelength selectivity, having the possibility to be tuned within UV up to the THz range, only by changing the type of material and the geometrical configuration [ 22 , 25 , 26 , 27 ].…”

Section: Introductionmentioning

confidence: 99%

Selective Mid-IR Metamaterial-Based Gas Sensor System: Proof of Concept and Performances Tests

et al. 2022

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In this paper, we propose a highly selective and efficient gas detection system based on a narrow-band IR metasurface emitter integrated with a resistive heater. In order to develop the sensor for the detection of specific gases, both the microheater and metasurface structures have been optimized in terms of geometry and materials. Devices with different metamaterial structures and geometries for the heater have been tested. Our prototype showed that the modification of the spectral response of metasurface-based structures is easily achieved by adapting the geometrical parameters of the plasmonic micro-/nanostructures in the metasurface. The advantage of this system is the on-chip integration of a thermal source with broad IR radiation with the metasurface structure, obtaining a compact selective radiation source. From the experimental data, narrow emission peaks (FWHM as low as 0.15 μm), corresponding to the CO2, CH4, and CO absorption bands, with a radiant power of a few mW were obtained. It has been shown that, by changing the bias voltage, a shift of a few tens of nm around the central emission wavelength can be obtained, allowing fine optimization for gas detection applications.

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Section: Introductionmentioning

confidence: 99%

Selective Mid-IR Metamaterial-Based Gas Sensor System: Proof of Concept and Performances Tests

et al. 2022

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“…In particular, micro-transducers' and micro-actuators' results are of paramount importance due to their role of micro-devices' interfaces [1,2]. In recent years, circular membrane MEMS technology has been exploited to this aim in a wide variety of technological fields such as thermo-elasticity [2][3][4], microfluidics [2,[5][6][7], electroelasticity [8][9][10][11][12], and biomedical engineering [13][14][15]. The focus on this geometry can mainly be attributed to the availability of theoretical models in both steady-state and dynamical conditions (see [16][17][18] and references within).…”

Section: Introduction and Problem Statementmentioning

confidence: 99%

Recovering of the Membrane Profile of an Electrostatic Circular MEMS by a Three-Stage Lobatto Procedure: A Convergence Analysis in the Absence of Ghost Solutions

2020

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In this paper, a stable numerical approach for recovering the membrane profile of a 2D Micro-Electric-Mechanical-Systems (MEMS) is presented. Starting from a well-known 2D nonlinear second-order differential model for electrostatic circular membrane MEMS, where the amplitude of the electrostatic field is considered proportional to the mean curvature of the membrane, a collocation procedure, based on the three-stage Lobatto formula, is derived. The convergence is studied, thus obtaining the parameters operative ranges determining the areas of applicability of the device under analysis.

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“…The presence of a certain gas can be detected by the change in resistance produced in the sensor due to the adsorption of the analyte molecules by the PS film [18,19]. In this chapter, we have discussed the fabrication procedure and the sensing mechanism of VOCs by PS-based gas sensor coated with ZnO (PS-ZnO) nanoparticles.…”

Section: Introductionmentioning

confidence: 99%

A Novel Sensing Method for VOCs Using Nanoparticle-Coated Nanoporous Silicon

Subramani¹,

Selvakumar²,

Lakshminarayanan³

2020

Emerging Micro - And Nanotechnologies

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Structural aspects, such as grain size, pore size, and crack-free film morphology, of porous silicon (PS), etc., play a vital role in the sensing of volatile organic compounds (VOCs). This chapter discusses a novel method for sensing of VOCs using porous silicon coated with a layer of ZnO (PS-ZnO). It was noted that the sensing ability of the PS sensor has increased due to the transconductance mechanism, as a result of the coating of ZnO over PS. Initially, porous silicon is formed by electrochemical wet etching of silicon and by electrophoretic deposition (EPD), ZnO is coated over porous silicon. An increase in the selectivity is due to the increase in surface-to-volume ratio and uniformity in the pore structures. The thickness of ZnO layer can be tuned up to 25 nm by applying a DC voltage between the copper electrode and the conductive silicon substrate immersed in a suspension of ZnO quantum dots. The influence of quantum dot concentration on the final layer thickness was studied by X-ray diffraction (XRD). The change in resistance for ethanol was found to be 12.8-16 MΩ and 8-16 MΩ for methanol.

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A Novel MEMS Microheater Based Alcohol Gas Sensor using Nanoparticles

Cited by 8 publications

References 0 publications

Selective Mid-IR Metamaterial-Based Gas Sensor System: Proof of Concept and Performances Tests

Selective Mid-IR Metamaterial-Based Gas Sensor System: Proof of Concept and Performances Tests

Recovering of the Membrane Profile of an Electrostatic Circular MEMS by a Three-Stage Lobatto Procedure: A Convergence Analysis in the Absence of Ghost Solutions

A Novel Sensing Method for VOCs Using Nanoparticle-Coated Nanoporous Silicon

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