A novel hybrid method combining ASP with PECVD for in - situ low temperature synthesis of vertically aligned carbon nanotube films

Abstract

In this study, an in-situ low temperature method to cost-effectively grow vertically aligned carbon nanotube (VACNT) films has been developed by combining advanced active screen plasma (ASP) technique with plasma enhanced chemical vapour deposition (PECVD). A novel active screen consisting of 316 stainless steel cylinder with double top lids was designed for the in-situ low-cost high-efficient preparation of catalyst films within a PECVD device, and VACNT films were grown from the catalyst films subsequently at low temperatures (≤ 500ºC). The deposited catalyst films and the VACNT films were characterised by SEM, AFM, XRD, Raman and TEM/EDS. The results show that the catalyst films consist of stainless steel nanoparticles with sizes around 50 nm. The growth of the CNTs is related to the PECVD temperature and the density of the CNTs is determined by the status of the catalyst films. The CNTs are multiwalled with nanoparticles at their tips. The mechanisms behind the in-situ low temperature synthesis are discussed based on the plasma physics, growth parameters and physical status of the catalyst films.

Study on the carbon nanotubes reinforced nanocomposite coatings

“…The growth processes were conducted at 30 W and acetylene was used as carbon source, diluted by argon and hydrogen, and their corresponding flow rate were 5 sccm, 50 sccm and 10 sccm. The specific settings are shown in our previous work [41]. four-point probe apparatus, while a current source was applied on two of the probes, and the inducing voltage on the other two probes were measured to calculate the sheet resistances.…”

2 Plasma surface activation and functionalization of carbon-based materials

“…CNTs exhibit extraordinary electrical, thermal and mechanical properties, similar to CNFs. CNTs are frequently synthesized by arc discharges, laser ablation or chemical vapor deposition (CVD) [33][34][35]. The latter method is capable of producing vertically aligned CNT (VACNT), but the process requires prior deposition of metal nanoparticles on the substrate to act as catalysts and nucleation sites.…”

“…It is known that plasma-enhanced CVD (PE-CVD) can reduce the deposition temperature, but the energy of the ions needs to be carefully controlled to enhance rather than suppress the growth of CNT [36]. A multistep process to deposit metal nanoparticles and grow CNTs at low temperatures has been recently developed based on the ASP technology [33].…”

“…Schematic diagram of the active screen setup used for PE-CVD of vertically aligned carbon nanotubes. Reprinted with permission from[33].…”

Modificación de la conductividad eléctrica de tinta comercial para impresión inkjet utilizando nanotubos de carbono multipared

“…A través del tiempo, los nanotubos de carbono (NTC) se han ganado una merecida reputación. Gracias a sus propiedades físicas, químicas, electrónicas, térmicas, mecánicas y opto eléctricas, los grupos de investigación e industriales de todo el mundo están mejorando constantemente su producción [1], [2]. Es un material versátil que se puede obtener recubriendo superficies, en forma de polvo o incluso en fibras.…”