1998
DOI: 10.1109/16.735743
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A novel hetero-material gate (HMG) MOSFET for deep-submicron ULSI technology

Abstract: A novel hetero-material gate MOSFET intended for integration into the existing deep-submicron silicon technology is proposed and simulated. It is shown that by adding a layer of material with a larger workfunction to the source side of the gate, short-channel effects can be greatly suppressed without degrading the driving ability. The threshold voltage roll-off can be compensated and tuned by controlling the length of this second gate. The new structure has great potential in breaking the barrier of deep-submi… Show more

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Cited by 97 publications
(11 citation statements)
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“…The proposed device can be fabricated using various techniques. In literature, some techniques have been suggested to fabricate DGTFETs and DM-DGTFETs [15], [21]- [27] and some techniques have been employed to fabricate the DMG structures [28]- [30]. Due to the structural similarity, the proposed devices can also be fabricated by adapting these techniques.…”
Section: A Device Fabricationmentioning
confidence: 99%
“…The proposed device can be fabricated using various techniques. In literature, some techniques have been suggested to fabricate DGTFETs and DM-DGTFETs [15], [21]- [27] and some techniques have been employed to fabricate the DMG structures [28]- [30]. Due to the structural similarity, the proposed devices can also be fabricated by adapting these techniques.…”
Section: A Device Fabricationmentioning
confidence: 99%
“…Gate engineering is one of the promising solutions to reduce the hot carrier effect and thus increase the lifetime of the device. MOSFET device structures including TFT, FinFET, nanowires that employ gate material engineering [8] improve transport efficiency in the gate by adjusting the pattern of electric field and the surface potential along the channel, which results in improved carrier transport efficiency, better transconductance and also clampdown of SCEs. [9] explains the dual material gate in FET, which employs gate-material engineering, i.e.…”
Section: Introductionmentioning
confidence: 99%
“…Moreover, the dual-material gate achieves simultaneous suppression of SCE. 17,18) Nonetheless, whether a metal can be used as the gate of MOSFETs is not only determined by its work function. It should meet the basic requirements such as thermal stability and process compatibility with dielectric deposition.…”
Section: Introductionmentioning
confidence: 99%