A novel friction-actuated 2-DOF high precision positioning stage with hybrid decoupling structure

Tian, Yanling; Huo, Zhichen; Wang, Fujun; Liang, Cunman; Shi, Beichao; Zhang, Dawei

doi:10.1016/j.mechmachtheory.2021.104511

Cited by 21 publications

(8 citation statements)

References 33 publications

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“…Wang et al (2019d) designed a twodegree-of-freedom FHMs-PSSA based on the surface's rectangular trajectory driving; two piezoelectric stacks were responsible for driving in both positive and negative directions, and the other was used as a switch for rotational motion and translational motion; the actuator could achieve a linear stroke of 50 mm and a rotation of 360°, and the corresponding resolutions were 19.85 nm and 1.32 mrad, respectively. As shown in Figure 8(b), Tian et al (2019Tian et al ( , 2022 proposed a multi-DOF FHMs-PSSA with series-parallel decoupling mechanism to achieve a more compact structure; although the sliders of the platform were still arranged in series in structure, the driving units were decoupled in parallel, which was more conducive to reducing the coupling error; moreover, to study the influence of the friction interface's contact force on the backward motion, the friction regulation unit was added in the direction perpendicular to the driving direction.…”

Section: Unidirectional Coupling Type Multi-degree-of-freedommentioning

confidence: 85%

Piezoelectric stick-slip actuators with flexure hinge mechanisms: A review

Qiao

et al. 2022

Journal of Intelligent Material Systems and Structures

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Piezoelectric stick-slip actuators (PSSAs) are famous for ultimate working condition adaptability, simple structure, and positioning accuracy. To meet the demand of industrial application, lots of PSSAs designed with flexure hinge mechanisms (FHMs-PSSAs) have been developed to realize the requirements of translational motion, rotational motion, multi-degree-of-freedom (multi-DOF) motion. The output performance of the FHMs-PSSAs has been greatly improved, including load capacity, speed, and accuracy; moreover, some approaches to solve the problem of the backward motion are provided as well. In this work, the working principle of FHMs-PSSAs is introduced, and the excitation signals applicable to FHMs-PSSAs are summarized. Based on the current research and development status, the progress of structure design of FHMs-PSSAs is introduced in accordance with translatory FHMs-PSSAs, rotary FHMs-PSSAs, and multi-DOF FHMs-PSSAs. Additionally, the developed analysis methods and design schemes to improve the performance are introduced, including theoretical analysis methods, consistency scheme of forward and reverse performance, suppression scheme of the backward motion, and improvement scheme of positioning accuracy. The significance of this work can be regarded as a further supplement to the previous review articles on the PSSAs, which will provide a reference and guidance for the future development of FHMs-PSSAs.

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Section: Unidirectional Coupling Type Multi-degree-of-freedommentioning

confidence: 85%

Piezoelectric stick-slip actuators with flexure hinge mechanisms: A review

Qiao

et al. 2022

Journal of Intelligent Material Systems and Structures

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“…Figure 3(b) shows the equivalent structure of a straight beam flexure hinge AB, where F is the force exerted by PZT I on the flexure hinge, and M is the resulting bending moment. Based on the bending deformation theory, the approximate differential equation of the deflection curve of the straight beam flexure hinge AB is obtained (Tian et al, 2022):…”

Section: Model Analysis Of Piezoelectric Stagementioning

confidence: 99%

A smooth-drive scheme for piezoelectric stage by coupling of stick-slip motion and inertial impact

Ning

Qiao

et al. 2022

Journal of Intelligent Material Systems and Structures

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The piezoelectric stick-slip stage is very important in industrial manufacturing and precision machining. However, due to the stick-slip principle, it is inevitable to produce backward motion, which leads to a decrease in precision and efficiency. A novel smooth-drive scheme for piezoelectric stage is proposed by coupling stick-slip motion and inertial impact in this paper. In the coupling counteract phase, the sliding friction force of stick-slip driving mechanism (SDM) is counteract by the impact force of inertial impact driving mechanism (IDM), thus eliminating the backward motion and realizing the smooth driving of the stage. The feasibility of the stage is analyzed by theoretical calculation and transient dynamics simulation. In addition, the designed stage is fabricated and conducted a complete set of experimental tests. The external dimensions of the stage is 45 mm (L) × 24 mm (W) × 22 mm (H), and the mass is 84 g. Experimental results show that the piezoelectric stage can not only achieve smooth driving, but also actively adjust the output smoothness by adjusting the excitation voltage of PZT I and PZT II. The linear fitting correlation coefficient R2 of the displacement curve can reach above 0.999, and it still keeps good smoothness at 200 Hz. The maximum vertical mass load of the stage is 4 kg, which is about 47 times the mass of the stage, and the resolution of stick-slip state is about 85 nm. The scheme has positive reference value in the field of stable and accurate positioning.

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“…The micro parts manipulated in precise assembly process are usually designed with the size ranging from several micrometers to millimeters which requires micron-level assembly precision [8,9]. Generally, precise robot is needed to be designed to complete this task [10][11][12]. Microscopic vision is usually used to guide the motion of the micro assembly robot and achieve precise alignment during micro assembling process.…”

Section: Introductionmentioning

confidence: 99%

Contact Force Sensing and Control for Inserting Operation During Precise Assembly Using a Micromanipulator Integrated With Force Sensors

Shi

Wang

Huo

et al. 2023

IEEE Trans. Automat. Sci. Eng.

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This paper proposes a novel contact force sensing and control method for the inserting operation during precise assembly process, which is based on a micromanipulator integrated with force sensors. At first, theoretical analysis is carried out to calculate the admissible contact force between the gripped holes and the pegs. The contact force thresholds which are smaller than the admissible contact forces are adopted in the control algorithm to avoid the rotating of the gripped holes during assembly process. The force sensors are calibrated using an ATI force sensor and the conversing coefficients are calculated. The admissible contact forces are tested when different contact distance and preload force are adopted. The performance of the proposed contact force sensing and control method is verified by carrying out the task of applying contact force on the surface of the gripped holes with different contacting speeds. The results indicate that the contact force can be adjusted to be smaller than the threshold 1 and the peg-in-hole assembly can be completed successfully.Note to Practitioners-This paper proposes a novel contact force sensing method during the inserting operation. Compared with the traditional contact force sensing method, this paper adopts the force sensor integrated into the micromanipulator instead of commercial force sensor to detect the contact force between two parts. To ensure the assembling precision, the theoretical analysis is conducted to calculated the admissible contact force to avoid the sliding and rotating of the gripped micro part during assembling. This work efficiently simplifies the contact force sensing and control process, where complex calibration process needn't to be carried out to eliminate the influence of the mass of the micromanipulator on the testing results. In addition, the assembling costs are reduced by replacing commercial force sensors with strain gauges.

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A novel friction-actuated 2-DOF high precision positioning stage with hybrid decoupling structure

Cited by 21 publications

References 33 publications

Piezoelectric stick-slip actuators with flexure hinge mechanisms: A review

Piezoelectric stick-slip actuators with flexure hinge mechanisms: A review

A smooth-drive scheme for piezoelectric stage by coupling of stick-slip motion and inertial impact

Contact Force Sensing and Control for Inserting Operation During Precise Assembly Using a Micromanipulator Integrated With Force Sensors

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