A novel fabrication process of MEMS devices on polyimide flexible substrates

Xiao, Suyan; Che, L. F.; Li, X. X.; Wang, Yunlai

doi:10.1016/j.mee.2007.08.004

Cited by 121 publications

(53 citation statements)

References 18 publications

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“…1,2 Great efforts have been made to develop various flexible electronic devices and systems such as displays, 3 eyeball camera, 4 memory, 5 lithium-ion batteries, 6 and transistor and circuits. 7 Attempts have also been made to fabricate microsystems on flexible substrates to deliver unique functions that electronic devices are lacking, including micromachined infrared bolometers, 8 piezoelectric actuators, 9 thin film bulk acoustic wave resonators, 10 piezoelectric pressure sensors, 11 and micro-fluidics. 12 Surface acoustic wave (SAW) resonators are one type of basic and essential electronic devices with widespread applications in electronics and communications as frequency filters, duplexer, and radio frequency tags (RFIDs), etc.…”

Section: Introductionmentioning

confidence: 99%

Crystalline structure effect on the performance of flexible ZnO/polyimide surface acoustic wave devices

Zhou

Jin

et al. 2013

Journal of Applied Physics

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This paper reports the fabrication of flexible surface acoustic wave (SAW) devices on ZnO/polyimide substrates and investigation of the effects of the deposition conditions, crystal quality, and film thickness of the ZnO films on the performance of the SAW devices. The deposition pressure has a significant effect on the crystal quality of the ZnO film, and which in turn affects the transmission of the SAW devices strongly. The device performance improves greatly and is mainly attributed to the better crystal quality of the film deposited at high pressure. The performance of the SAW devices also improves significantly with increase in ZnO film thickness, owing to the reduced defects and improved piezoelectric effect for the films with large grain sizes and better crystallinity as the film thickness increases. Flexible SAW devices with a resonant frequency of 153 MHz, a phase velocity of 1836 m/s, and a coupling coefficient of 0.79% were obtained on the ZnO film of 4 μm thickness, demonstrated its great potential for applications in electronics and microsystems.

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Section: Introductionmentioning

confidence: 99%

Crystalline structure effect on the performance of flexible ZnO/polyimide surface acoustic wave devices

Zhou

Jin

et al. 2013

Journal of Applied Physics

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“…So, in the hyperthermia it is necessary to develop a microtemperature sensor for measuring the temperature precisely. Although many researchers have fabricated some microtemperature sensors, they cannot be used as a flexible device to implant into the objects due to its fabrication based on silicon process [6][7][8]. Its natural brittle feature is not beneficial.…”

Section: Flexible Implantable Microtemperature Sensormentioning

confidence: 99%

Lab-on-a-Tube Surface Micromachining Technology

Yang¹,

Zhang²

2017

Thin Film Processes - Artifacts on Surface Phenomena and Technological Facets

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In this chapter, the lab-on-a-tube surface micromachining technology will be used to fabricate a flexible implantable microtemperature sensor for hyperthermia application and a three-electrode system on a polymer tube surface for glucose monitoring application. This micromachining process is based on two homemade equipments: a spray coating equipment and a programmable UV 3D projection lithography system with alignment. In the spray coating system, there is a heater nozzle next to the spray nozzle for real-time heating. Pure nitrogen is flowed through the heater nozzle, warmed up and sprayed onto the tube substrate surface. The programmable UV lithography equipment for cylindrical substrate mainly consists of four parts: a uniform illumination system, a reduced projection lithography system, a synchronized motion stage system, and a Charge-Coupled Device (CCD) multilayer alignment system which is used to observe simultaneously the projected mask's patterns and those ever fabricated on the tube. Using the developed labon-a-tube surface micromachining technology, an implantable flexible microtemperature sensor and a three-electrode microstructure are successfully fabricated on the flexible polymer tube with 330 μm outer diameter, respectively. The test temperature coefficient of resistance (TCR) of the temperature sensor is 0.0034/°C. The measured cyclic voltammetry curve shows that the three-electrode system has a good redox property.

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“…Both the MZI-EO device and AWG are fabricated on a common polyimide substrate [15] film. A 100 µm thick polyimide layer is flexible and strong enough to support the MZI-EO device and AWG devices.…”

Section: Design and Fabrication Of The Proposed Flexible Interrogatormentioning

confidence: 99%

A miniaturized flexible surface attachable interrogator for hybrid optical fiber sensing

Ramakrishnan¹,

Rajan

Semenova³

et al. 2014

Micro & Optical Tech Letters

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A novel fabrication process of MEMS devices on polyimide flexible substrates

Cited by 121 publications

References 18 publications

Crystalline structure effect on the performance of flexible ZnO/polyimide surface acoustic wave devices

Crystalline structure effect on the performance of flexible ZnO/polyimide surface acoustic wave devices

Lab-on-a-Tube Surface Micromachining Technology

A miniaturized flexible surface attachable interrogator for hybrid optical fiber sensing

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