A Novel Environmentally-friendly Corrosion-free Post-stripping Rinsing Procedure After Solvent Strip

VOS, $$$; Rotondaro,; Mertens,; Meuris,; Heyns,

doi:10.1109/vlsit.1997.623683

Cited by 2 publications

(2 citation statements)

References 4 publications

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“…In one experiment, pulse-echo was performed in deionized water (DI water) to verify successful operation in an aqueous and corrosive medium. DI water is also known to corrode aluminum electrodes [25,26]. Moreover, water breaks down when subjected to high electric field [27].…”

Section: Device Characterizationmentioning

confidence: 99%

Biocompatible coatings for CMUTs in a harsh, aqueous environment

Zhuang

Nikoozadeh

Beasley

et al. 2007

J. Micromech. Microeng.

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The results of coating capacitive micromachined ultrasonic transducer (CMUT) arrays with two different biocompatible materials, parylene-c and polydimethylsiloxane (PDMS), are reported. These materials were characterized for use with CMUTs to enable direct contact transcutaneous and in vivo imaging. A passivation coating is required to provide electrical isolation to the active areas of the device and to protect it from a corrosive environment. It must also provide good mechanical characteristics to void imaging artifacts. The coated devices were compared side by side with uncoated devices for testing in air. The resonant frequency, collapse voltage and crosstalk were sampled. Parylene coated CMUTs were also tested underwater using pulse excitation. The parylene coating provided electrical insulation to the aqueous solution for 14 days. Both coatings showed a decrease in device resonant frequency and an increase in collapse voltage, as expected from the proposed theory.

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Section: Device Characterizationmentioning

confidence: 99%

Biocompatible coatings for CMUTs in a harsh, aqueous environment

Zhuang

Nikoozadeh

Beasley

et al. 2007

J. Micromech. Microeng.

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show abstract

“…22 Promising materials, such as Al, Mo, and W, could be corrosive in aqueous solutions. Especially, Mo 23 and Al 18,24 are readily oxidized in acidic and/or oxidative solutions. In the resist removal process by moist ozone treatment, carbonic acids, such as oxalic acid, were detected as the degradation byproducts of the resist oxidation.…”

mentioning

confidence: 99%

Development of a Method for Resist Removal by Ozone with Acetic Acid Vapor

Noda

Kawase

Horibe

et al. 2005

J. Electrochem. Soc.

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A method of removing the photoresist using ozone gas with acetic acid vapor has been developed. Glass substrates ͑size 100 ϫ 100 mm 2 ͒ coated with I-line resist were treated under the conditions of substrate temperature, (T S ) 27-50°C; acetic acid vapor, 2-18 vol %; ozone, 0-9.3 vol % ͑0-200 g/m 3 ͒; total gas flow rate, 2 L/min; and gas pressure, 100 kPa. A previous ozone treatment with oversaturated water vapor or sprayed water overcame the limitation of ozone diffusion into the resist by the control of the water film on the resist. In this study, pure acetic acid vapor has been first applied for the resist removal by ozone in order to improve the oxidation rate of the resist, because acetic acid is an inactive solvent in the ozonization, and the solubility of ozone is much higher than water. It was observed that the resist removal rate increased with acetic acid and ozone concentration, and reached at 6 m/min at T S ϭ 50°C, which was about six times greater than that of the previous ozone treatment. Metal corrosion of molybdenum and aluminum electrodes was found negligible during the ozone treatment with acetic acid vapor. The mechanism of resist removal without the metal corrosion by ozone with acetic acid vapor is also discussed, based on the solubility of ozone in acetic acid and the corrosion current in ozonized solutions.

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A Novel Environmentally-friendly Corrosion-free Post-stripping Rinsing Procedure After Solvent Strip

Cited by 2 publications

References 4 publications

Biocompatible coatings for CMUTs in a harsh, aqueous environment

Biocompatible coatings for CMUTs in a harsh, aqueous environment

Development of a Method for Resist Removal by Ozone with Acetic Acid Vapor

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