A Novel Direct Inverse Modeling Approach for Hysteresis Compensation of Piezoelectric Actuator in Feedforward Applications

Qin, Yanding; Tian, Yanling; Zhang, Dawei; Shirinzadeh, Bijan; Fatikow, Sergej

doi:10.1109/tmech.2012.2194301

Cited by 216 publications

(118 citation statements)

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“…To solve this problem, flexure-based mechanisms are generally utilized to guide the motion of the platform. Since flexure hinges have a number of advantages including no friction, no backlash, free of lubrication [7,8].…”

Section: Introductionmentioning

confidence: 99%

“…Based on the developed inverse PI hysteresis model, a feedforward controller can be constructed to compensate the nonlinearity of the piezoelectric actuator [21,22]. In order to eliminate/reduce the external disturbance and further improve the positioning accuracy of the micro/nano positioning mechanism, a feedback controller is usually adopted to form the combined feedforward/feedback control of such kinds of micro/nano positioning mechanisms [7,23,24]. However, the performance of the feedforward controller has significantly influence on the entire system.…”

Section: Introductionmentioning

confidence: 99%

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Design and control methodology of a 3-DOF flexure-based mechanism for micro/nano-positioning

Guo

Tian

Liu

et al. 2015

Robotics and Computer-Integrated Manufacturing

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2015)Design and control methodology of a 3-DOF flexure-based mechanism for micro/nanopositioning. Copies of full items can be used for personal research or study, educational, or not-forprofit purposes without prior permission or charge. Provided that the authors, title and full bibliographic details are credited, a hyperlink and/or URL is given for the original metadata page and the content is not changed in any way.

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Section: Introductionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Design and control methodology of a 3-DOF flexure-based mechanism for micro/nano-positioning

Guo

Tian

Liu

et al. 2015

Robotics and Computer-Integrated Manufacturing

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“…On the one hand, the shape of a PEA changes if charge or voltage is exerted, and thus generating sub-nanometer resolution actuation. However, PEAs suffer from the inherent hysteresis and creep nonlinearities [6][7][8]. Many feedforward and feedback methodologies have been proposed to compensate for the hysteresis and creep nonlinearities of PEAs [9,10].…”

Section: Introductionmentioning

confidence: 99%

Closed-Form Modeling and Analysis of an XY Flexure-Based Nano-Manipulator

Qin

Zhao

Shirinzadeh

et al. 2018

Chin. J. Mech. Eng.

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Flexure-based mechanisms are widely utilized in nano manipulations. The closed-form statics and dynamics modeling is difficult due to the complex topologies, the inevitable compliance of levers, the Hertzian contact interface, etc. This paper presents the closed-form modeling of an XY nano-manipulator consisting of statically indeterminate symmetric (SIS) structures using leaf and circular flexure hinges. Theoretical analysis reveals that the lever's compliance, the contact stiffness, and the load mass have significant influence on the static and dynamic performances of the system. Experiments are conducted to verify the effectiveness of the established models. If no piezoelectric actuator (PEA) is installed, the influence of the contact stiffness can be eliminated. Experimental results show that the estimation error on the output stiffness and first natural frequency can reach 2% and 1.7%, respectively. If PEAs are installed, the contact stiffness shows up in the models. As no effective method is currently available to measure or estimate the contact stiffness, it is impossible to precisely estimate the performance of the overall system. In this case, the established closed-form models can be utilized to calculate the bounds of the performance. The established closed-form models are widely applicable in the design and optimization of planar flexure-based mechanisms.Keywords: Flexure-based mechanism, Statically indeterminate structure, Dynamics, Lever mechanism, Piezoelectric actuator © The Author(s) 2018. This article is distributed under the terms of the Creative Commons Attribution 4.0 International License (http://creativecommons.org/licenses/by/4.0/), which permits unrestricted use, distribution, and reproduction in any medium, provided you give appropriate credit to the original author(s) and the source, provide a link to the Creative Commons license, and indicate if changes were made.

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“…Piezoelectric (PZT) actuators have the advantages of high force output to weight ratio, fast response and zero backlash [18][19][20][21][22][23][24][25] , and thus they have been widely used in microgrippers. Chen at al.…”

Section: Introductionmentioning

confidence: 99%

A novel monolithic piezoelectric actuated flexure-mechanism based wire clamp for microelectronic device packaging

Liang

Wang

Tian

et al. 2015

Review of Scientific Instruments

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Placid. (2015) A novel monolithic piezoelectric actuated flexure-mechanism based wire clamp for microelectronic device packaging. Review of Scientific Instruments, 86 (4). 045106. Permanent WRAP url: http://wrap.warwick.ac.uk/76447 Copyright and reuse:The Warwick Research Archive Portal (WRAP) makes this work by researchers of the University of Warwick available open access under the following conditions. Copyright © and all moral rights to the version of the paper presented here belong to the individual author(s) and/or other copyright owners. To the extent reasonable and practicable the material made available in WRAP has been checked for eligibility before being made available.Copies of full items can be used for personal research or study, educational, or not-for profit purposes without prior permission or charge. Provided that the authors, title and full bibliographic details are credited, a hyperlink and/or URL is given for the original metadata page and the content is not changed in any way. Publisher's statement:Copyright ( A note on versions:The version presented here may differ from the published version or, version of record, if you wish to cite this item you are advised to consult the publisher's version. Please see the 'permanent WRAP url' above for details on accessing the published version and note that access may require a subscription.A novel monolithic piezoelectric actuated flexure-mechanism based wire clamp for microelectronic device packaging A novel monolithic piezoelectric actuated wire clamp is presented in this paper to achieve fast, accurate and robust microelectronic device packaging. The wire clamp has compact flexure-based mechanical structure and light weight. To obtain large and robust jaw displacements and ensure parallel jaw grasping, a two-stage amplification composed of a homothetic bridge type mechanism and parallelogram leverage mechanism was designed. Pseudo-rigid-body model (PRBM) and Lagrange approaches were employed to conduct the kinematic, static and dynamic modeling of the wire clamp, and optimization design was carried out. The displacement amplification ratio, maximum allowable stress and natural frequency were calculated. Finite element analysis (FEA) was conducted to evaluate the characteristics of the wire clamp and wire Electro Discharge Machining (EDM) technique was utilized to fabricate the monolithic structure. Experimental tests were carried out to investigate the performance, and the experimental results match well with the theoretical calculation and FEA.The amplification ratio of the clamp is 20.96, and the working mode frequency is 895 Hz.Step response test show the wire clamp has fast response and high accuracy, and the motion resolution is 0.2μm. High speed precision grasping operations of gold and copper wires were realized using the wire clamper.

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A Novel Direct Inverse Modeling Approach for Hysteresis Compensation of Piezoelectric Actuator in Feedforward Applications

Cited by 216 publications

References 45 publications

Design and control methodology of a 3-DOF flexure-based mechanism for micro/nano-positioning

Design and control methodology of a 3-DOF flexure-based mechanism for micro/nano-positioning

Closed-Form Modeling and Analysis of an XY Flexure-Based Nano-Manipulator

A novel monolithic piezoelectric actuated flexure-mechanism based wire clamp for microelectronic device packaging

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