A novel CPW structure for high-speed interconnects

Yoon, Sung-Hyun; Jeong, Sunho; Yook, J.-G.; Kim, Y.-J.; Lee, S.-G.; Seo, Okkyun; Lim, Koeng Su; Kim, D.-S.

doi:10.1109/mwsym.2001.967006

Cited by 14 publications

(8 citation statements)

References 6 publications

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“…The antenna had a physical size of 80 mm × 67 mm, which failed to meet the design requirements for miniaturization of wearable antennas [17]. Coplanar-waveguide (CPW) feeding is also a common method to improve the bandwidth and realize miniaturization [18][19][20][21][22][23]. Great progress has been achieved for traditional antennas to solve the problems relating to antenna gain, radiation pattern, return loss, and size miniaturization.…”

Section: Introductionmentioning

confidence: 99%

Compact and Low-Profile UWB Antenna Based on Graphene-Assembled Films for Wearable Applications

Fang

Song

Zhao

et al. 2020

Sensors

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In this article, a graphene-assembled film (GAF)-based compact and low-profile ultra-wide bandwidth (UWB) antenna is presented and tested for wearable applications. The highly conductive GAFs (~106 S/m) together with the flexible ceramic substrate ensure the flexibility and robustness of the antenna, which are two main challenges in designing wearable antennas. Two H-shaped slots are introduced on a coplanar-waveguide (CPW) feeding structure to adjust the current distribution and thus improve the antenna bandwidth. The compact GAF antenna with dimensions of 32 × 52 × 0.28 mm3 provides an impedance bandwidth of 60% (4.3–8.0 GHz) in simulation. The UWB characteristics are further confirmed by on-body measurements and show a bending insensitive bandwidth of ~67% (4.1–8.0 GHz), with the maximum gain at 7.45 GHz being 3.9 dBi and 4.1 dBi in its flat state and bent state, respectively. Our results suggest that the proposed antenna functions properly in close proximity to a human body and can sustain repetitive bending, which make it well suited for applications in wearable devices.

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Section: Introductionmentioning

confidence: 99%

Compact and Low-Profile UWB Antenna Based on Graphene-Assembled Films for Wearable Applications

Fang

Song

Zhao

et al. 2020

Sensors

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“…However, these approaches require complex fabrication procedures. Other alternatives involve geometrical changes in the shapes of the signal line or the ground planes by inverting or elevating the line [6][7][8].…”

Section: Introductionmentioning

confidence: 99%

Micromachined elevated CPWs for high-performance microwave circuits

Lee

Kim

et al. 2006

J. Micromech. Microeng.

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In this paper, micromachined elevated coplanar waveguides (ECPWs) based on CMOS-grade silicon with a thin film interface are presented. The respective signal lines for the ECPWs are 10 µm elevated into the air with supporting conductors so as to obtain low attenuation characteristics. For the designed ECPWs, it has been shown that a low loss transmission line is obtainable compared to the conventional CPW and a very low effective dielectric constant close to 2 could be realized by confining most of the electromagnetic fields in the lossless air layer. The overlapped configuration with an elevated signal line placed partially above the planar ground planes on the thin film interface yielded the best attenuation performance, i.e., about 0.29 dB mm−1 at 20 GHz. In addition, a Chebyshev low-pass filter (LPF) with 0.5 dB ripple is designed on the basis of the high-Z0 and low-Z0 ECPWs, and fabricated using the surface micromaching technique. The measured data show good agreement with the predicted values. It is expected that the suggested ECPWs can be applied to high-performance microwave/millimeterwave circuits by employing low-cost silicon surface micromachining technology.

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“…Second, the substrate coupling can also be effectively reduced by inserting a low-loss low-k dielectric layer [4]- [8] between the CPW and the lossy silicon substrate. Another widely investigated approach is to apply micromachining techniques to remove the silicon substrate underneath (or around) the signal line to reduce the substrate loss [9]- [11]. However, the mechanical strength of CPWs fabricated on the suspended membrane is questionable, especially for long CPWs.…”

mentioning

confidence: 99%

Characterization and Attenuation Mechanism of CMOS-Compatible Micromachined Edge-Suspended Coplanar Waveguides on Low-Resistivity Silicon Substrate

Leung

Hon²,

Zhang³

et al. 2006

IEEE Trans. Adv. Packag.

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This paper presents detailed characterization of a category of edge-suspended coplanar waveguides that were fabricated on low-resistivity silicon substrates using improved CMOS-compatible micromachining techniques. The edge-suspended structure is proposed to provide reduced substrate loss and strong mechanical support at the same time. It is revealed that, at radio or microwave frequencies, the electromagnetic waves are highly concentrated along the edges of the signal line. Removing the silicon underneath the edges of the signal line, along with the silicon between the signal and ground lines, can effectively reduce the substrate coupling and loss. The edge-suspended structure has been implemented by a combination of deep reactive ion etching and anisotropic wet etching. Compared to the conventional silicon-based coplanar waveguides, which show an insertion loss of 2.5dB/mm, the loss of edge-suspended coplanar waveguides with the same dimensions is reduced to as low as 0.5 dB/mm and a much reduced attenuation per wavelength (dB/ ) at 39 GHz. Most importantly, the edge-suspended coplanar waveguides feature strong mechanical support provided by the silicon remaining underneath the center of the signal line. The performance of the coplanar waveguides is evaluated by high-frequency measurement and full-wave electromagnetic (EM) simulation. In addition, the resistance, inductance, conductance, capacitance (RLGC) line parameters and the propagation constant of the coplanar waveguides (CPWs) were extracted and analyzed.Index Terms-Current crowding, edge-suspended coplanar waveguide (CPW), inductively coupled plasma deep reactive ion etching (ICP-DRIE), micromachining, proximity effect, tetramethyl ammonium hydroxide (TMAH) anisotropic silicon etching.

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A novel CPW structure for high-speed interconnects

Cited by 14 publications

References 6 publications

Compact and Low-Profile UWB Antenna Based on Graphene-Assembled Films for Wearable Applications

Compact and Low-Profile UWB Antenna Based on Graphene-Assembled Films for Wearable Applications

Micromachined elevated CPWs for high-performance microwave circuits

Characterization and Attenuation Mechanism of CMOS-Compatible Micromachined Edge-Suspended Coplanar Waveguides on Low-Resistivity Silicon Substrate

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