2017
DOI: 10.1016/j.isatra.2017.08.001
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A novel constrained H 2 optimization algorithm for mechatronics design in flexure-linked biaxial gantry

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Cited by 26 publications
(3 citation statements)
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“…The nonlinear coupling characteristic is not considered. The same situation can also be found in Ma et al (2017) . Li et al (2011) proposed a synchronous control model of dual-driving system applied on the gantry-type machine tools with travelling bridge.…”
Section: Introductionsupporting
confidence: 69%
“…The nonlinear coupling characteristic is not considered. The same situation can also be found in Ma et al (2017) . Li et al (2011) proposed a synchronous control model of dual-driving system applied on the gantry-type machine tools with travelling bridge.…”
Section: Introductionsupporting
confidence: 69%
“…H-type air floating motion platform can realize two degrees of freedom large stroke precise positioning motion and is widely applied in lithography silicon wafer stage, precision measuring equipment, and laser drilling equipment [ 1 , 2 , 3 ]. The platform is directly driven by the linear motor and supported and guided by the air floating guideway, which has the advantages of symmetrical structure and large overall stiffness.…”
Section: Introductionmentioning
confidence: 99%
“…In the more conventional configuration, the carriages and the cross-arm are linked by rigid joints, and this conventional design has demonstrated its effectiveness in minimizing various de-synchronization issues [2], [3]. However, in certain scenarios when the involved de-synchronization requirements substantially increases to a higher degree, the large inter-axis coupling forces may damage the joints [4]. To prevent this kind of unintended damage, alternative flexure-based mechanisms have been designed and extensively adopted instead in various appropriate classes of precision motion stages [5]- [8].…”
Section: Introductionmentioning
confidence: 99%