Proceedings of the International Solid-State Sensors and Actuators Conference - TRANSDUCERS '95
DOI: 10.1109/sensor.1995.721945
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A Novel Chemical Sensor Using CH/sub3/Si(OCH/sub3/)Sol-gel Thin Film Coated Quartz-resonator Microbalance

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“…Quartz crystal microbalance (QCM) is best suitable for this requisite since it is highly sensitive to mass changes [4][5][6]. QCM has been widely used as a mass sensor by measuring the shift in resonance frequency due to mass loading [4][5][6][7][8][9]. The change in mass (Δ ) of the QCM can be estimated by measuring the shift in the resonance frequency (Δ ) and is given by Sauerbrey equation [9,10]:…”
Section: Introductionmentioning
confidence: 99%
“…Quartz crystal microbalance (QCM) is best suitable for this requisite since it is highly sensitive to mass changes [4][5][6]. QCM has been widely used as a mass sensor by measuring the shift in resonance frequency due to mass loading [4][5][6][7][8][9]. The change in mass (Δ ) of the QCM can be estimated by measuring the shift in the resonance frequency (Δ ) and is given by Sauerbrey equation [9,10]:…”
Section: Introductionmentioning
confidence: 99%