A Novel Capacitive Low-Humidity Sensor Based on a Double-Sided Structure

Chen, Hui; Jiang, Shubo; Tao, Fangling; Pan, Yu

doi:10.1109/tim.2023.3237227

Cited by 5 publications

(2 citation statements)

References 26 publications

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“…There are many types of humidity sensors, mainly including capacitive, 5,6 impedance, 7 current, 8 microwave, 9,10 quartz crystal microbalance (QCM), 11,12 surface acoustic wave (SAW), 13 and optical. 14−16 Among them, optical sensors are very attractive due to strong antielectromagnetic interference, fast response time, simple preparation process, and low price.…”

Section: Introductionmentioning

confidence: 99%

“…There are many types of humidity sensors, mainly including capacitive, , impedance, current, microwave, , quartz crystal microbalance (QCM), , surface acoustic wave (SAW), and optical. − Among them, optical sensors are very attractive due to strong antielectromagnetic interference, fast response time, simple preparation process, and low price. The Fabry–Pérot (F–P) cavity is an interference-type optical structure, which is widely used in the field of sensing due to its ability to reflect multiple times and limit the electromagnetic field to a small volume. , The humidity sensing performance of the F–P cavity mainly relies on the moisture sensing material constructed of the cavity.…”

Section: Introductionmentioning

confidence: 99%

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Fabry–Pérot Cavity Based on Metal–Organic Framework/Graphene Oxide Heterostructure Membranes for Humidity Sensing

Zhang,

Chen,

Tian

et al. 2024

ACS Appl. Nano Mater.

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This paper reports a Fabry−Peŕot (F−P) cavity constructed of heterostructure membranes by metal−organic framework 801 (MOF-801) and graphene oxide (GO) that can achieve highperformance relative humidity (RH) sensing. The reflectance spectrum of the cavity is tuned by adjusting the concentration of MOF-801, spin coating period, and spin coating speed to achieve the optimal reflection waveform. The humidity sensing performance of the MOF-801 membrane and MOF-801/GO heterostructure membrane F−P cavities were investigated systematically. MOF-801/GO heterostructure membranes show higher humidity sensitivity (0.32 nm/% RH) and lower detection limit (0.31% RH) comparing with MOF-801 membranes because the multifunctional reactive groups of GO can interact with H 2 O, which enhances adsorption of H 2 O. The MOF-801/GO heterostructure membrane F−P cavity shows a fast optical response (400 ms), with a maximum response value of 27.9 nm (Δλ) at 90% RH. Moreover, the MOF-801/GO heterostructure membrane cavity exhibits excellent selectivity for H 2 O vapor among four interfering gases of CO 2 , N 2 , He, and Ar. Meanwhile, the cavity keeps exceptional repeatability and reliability at different RH values. The sensitivity of the MOF-801/GO heterostructure membrane F−P cavity under mouth breathing is excellent, indicating the cavity is a promising candidate for human respiratory monitoring. The F−P cavity based on MOF-801/GO heterostructure membranes provides a path to fabricate high-performance real-time monitoring of humidity sensors.

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