A Novel Bulk Acoustic Wave Resonator for Filters and Sensors Applications

Zhang, Zhixin; Liang, Ji; Zhang, Daihua; Zhang, Hao

doi:10.3390/mi6091306

Cited by 10 publications

(5 citation statements)

References 17 publications

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“…Deposition of the AlN layer was under strict process control with well-optimized parameters to ensure good crystallinity. The film exhibited excellent piezoelectric properties as demonstrated in our previous studies on Bulk Acoustic Wave (BAW) 28 and Contour Mode Resonators (CMRs). 29,30 After completion of the SMR, a monolayer graphene film was then transferred onto the surface to form a semiconducting channel between the two top electrodes.…”

Section: Resultssupporting

confidence: 52%

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Chemiresistive and Gravimetric Dual-Mode Gas Sensor toward Target Recognition and Differentiation

Chen

Zhang

Feng

et al. 2016

ACS Appl. Mater. Interfaces

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We demonstrate a dual-mode gas sensor for simultaneous and independent acquisition of electrical and mechanical signals from the same gas adsorption event. The device integrates a graphene field-effect transistor (FET) with a piezoelectric resonator in a seamless manner by leveraging multiple structural and functional synergies. Dual signals resulting from independent physical processes, i.e., mass attachment and charge transfer can reflect intrinsic properties of gas molecules and potentially enable target recognition and quantification at the same time. Fabrication of the device is based on standard Integrated Circuit (IC) foundry processes and fully compatible with system-on-a-chip (SoC) integration to achieve extremely small form factors. In addition, the ability of simultaneous measurements of mass adsorption and charge transfer guides us to a more precise understanding of the interactions between graphene and various gas molecules. Besides its practical functions, the device serves as an effective tool to quantitatively investigate the physical processes and sensing mechanisms for a large library of sensing materials and target analytes.

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Section: Resultssupporting

confidence: 52%

Section: Results and Discussionmentioning

confidence: 52%

Chemiresistive and Gravimetric Dual-Mode Gas Sensor toward Target Recognition and Differentiation

Chen

Zhang

Feng

et al. 2016

ACS Appl. Mater. Interfaces

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“…Thus, the absorption can switch between two separate phases of GST. The dynamic absorption control in the presented structure represents a distinct advantage over passive infrared absorbers and emitters [22,34,35,36].…”

Section: Resultsmentioning

confidence: 99%

“…Spectral controlling and shaping with nanostructures in the MIR region is a hot topic because of the advances in applications such as biochemical sensing, imaging, IR labelling, and so on [22,23,24]. The fast switching between amorphous and crystalline phases of GST makes it a candidate for active MIR photonic devices.…”

Section: Introductionmentioning

confidence: 99%

Intensity Switchable and Wide-Angle Mid-Infrared Perfect Absorber with Lithography-Free Phase-Change Film of Ge2Sb2Te5

Hua

Zheng

2019

Micromachines

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The range of fundamental phenomena and applications achievable by metamaterials (MMs) can be significantly extended by dynamic control over the optical response. A mid-infrared tunable absorber which consists of lithography-free planar multilayered dielectric stacks and germanium antimony tellurium alloy (Ge2Sb2Te5, GST) thin film was presented and studied. The absorption spectra under amorphous and crystalline phase conditions was evaluated by the transfer matrix method (TMM). It was shown that significant tuning of absorption can be achieved by switching the phase of thin layer of GST between amorphous and crystalline states. The near unity (>90%) absorption can be significant maintained by incidence angles up to 75 under crystalline state for both transverse electric (TE) and transverse magnetic (TM) polarizations. The proposed method enhances the functionality of MMs-based absorbers and has great potential for application to filters, emitters, and sensors.

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“…Microbeam-based structures are widely applied in MEMS, such as microactuator/sensor [ 1 , 2 , 3 ], energy harvester [ 4 ], microresonator [ 5 , 6 , 7 ], gyroscope [ 8 ], microgripper [ 9 , 10 ] and so on. Their light weight, small size, low-energy consumption and durability make them even more attractive.…”

Section: Introductionmentioning

confidence: 99%

Monostable Dynamic Analysis of Microbeam-Based Resonators via an Improved One Degree of Freedom Model

Zhang

Wang

et al. 2018

Micromachines

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Monostable vibration can eliminate dynamic bifurcation and improve system stability, which is required in many microelectromechanical systems (MEMS) applications, such as microbeam-based and comb-driven resonators. This article aims to theoretically investigate the monostable vibration in size-effected MEMS via a low dimensional model. An improved single degree of freedom model to describe electrically actuated microbeam-based resonators is obtained by using modified couple stress theory and Nonlinear Galerkin method. Static displacement, pull-in voltage, resonant frequency and especially the monostable dynamic behaviors of the resonators are investigated in detail. Through perturbation analysis, an approximate average equation is derived by the application of the method of Multiple Scales. Theoretical expressions about parameter space and maximum amplitude of monostable vibration are then deduced. Results show that this improved model can describe the static behavior more accurately than that of single degree of freedom model via traditional Galerkin Method. This desired monostable large amplitude vibration is significantly affected by the ratio of the gap width to mircobeam thickness. The optimization design results show that reasonable decrease of this ratio can be beneficial to monostable vibration. All these analytical results are verified by numerical results via Differential Quadrature method, which show excellent agreement with each other. This analysis has the potential of improving dynamic performance in MEMS.

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A Novel Bulk Acoustic Wave Resonator for Filters and Sensors Applications

Cited by 10 publications

References 17 publications

Chemiresistive and Gravimetric Dual-Mode Gas Sensor toward Target Recognition and Differentiation

Chemiresistive and Gravimetric Dual-Mode Gas Sensor toward Target Recognition and Differentiation

Intensity Switchable and Wide-Angle Mid-Infrared Perfect Absorber with Lithography-Free Phase-Change Film of Ge2Sb2Te5

Monostable Dynamic Analysis of Microbeam-Based Resonators via an Improved One Degree of Freedom Model

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