A Novel Approach to Measure the Hydraulic Capacitance of a Microfluidic Membrane Pump

Wu, Chien–Heng; Chen, Chia-Wei; Kuo, Long-Sheng; Chen, Ping‐Hei

doi:10.1155/2014/198620

Cited by 4 publications

(3 citation statements)

References 14 publications

(28 reference statements)

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“…Via this concept, an actuator disc, a magnetized permalloy strip, a bulk magnet or an embedded electromagnetic coil can be integrated into the polymer membrane structure to generate force for the membrane deformation purpose [79][80][81][82]. Soft lithography technique is not only an inexpensive and simple fabrication process but it can also manipulate the texture of the polymer membrane during fabrication to control its flexibility which is vital for membrane actuation [83][84][85].…”

Section: Fabrication Of Em Actuatormentioning

confidence: 99%

Polymer-Based MEMS Electromagnetic Actuator for Biomedical Application: A Review

et al. 2020

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In this study, we present a comprehensive review of polymer-based microelectromechanical systems (MEMS) electromagnetic (EM) actuators and their implementation in the biomedical engineering field. The purpose of this review is to provide a comprehensive summary on the latest development of electromagnetically driven microactuators for biomedical application that is focused on the movable structure development made of polymers. The discussion does not only focus on the polymeric material part itself, but also covers the basic mechanism of the mechanical actuation, the state of the art of the membrane development and its application. In this review, a clear description about the scheme used to drive the micro-actuators, the concept of mechanical deformation of the movable magnetic membrane and its interaction with actuator system are described in detail. Some comparisons are made to scrutinize the advantages and disadvantages of electromagnetic MEMS actuator performance. The previous studies and explanations on the technology used to fabricate the polymer-based membrane component of the electromagnetically driven microactuators system are presented. The study on the materials and the synthesis method implemented during the fabrication process for the development of the actuators are also briefly described in this review. Furthermore, potential applications of polymer-based MEMS EM actuators in the biomedical field are also described. It is concluded that much progress has been made in the material development of the actuator. The technology trend has moved from the use of bulk magnetic material to using magnetic polymer composites. The future benefits of these compact flexible material employments will offer a wide range of potential implementation of polymer composites in wearable and portable biomedical device applications.

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Section: Fabrication Of Em Actuatormentioning

confidence: 99%

Polymer-Based MEMS Electromagnetic Actuator for Biomedical Application: A Review

et al. 2020

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“…10 Demoulding of PDMS from metallic moulds has also been performed successfully without the need for surface coatings, further increasing the appeal of metallic moulds. [11][12][13] The use of lasers for the manufacture of metallic moulds has become increasingly popular in recent years. Laser ablation is a non-contact process and can achieve high resolution geometries, limited by the beam spot diameter of the laser optics system.…”

Section: Introductionmentioning

confidence: 99%

“…10 Demoulding of PDMS from metallic moulds has also been performed successfully without the need for surface coatings, further increasing the appeal of metallic moulds. 11–13…”

Section: Introductionmentioning

confidence: 99%

Rapid prototyping method for 3D PDMS microfluidic devices using a red femtosecond laser

Saadat

Taylor

Hughes

et al. 2020

Advances in Mechanical Engineering

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A rapid prototyping technique is demonstrated which uses a red femtosecond laser to produce a metallic mould which is then directly used for the replica moulding of PDMS. The manufacturing process can be completed in less than 6 h making it a viable technique for testing new designs quickly. The technique is validated by creating a microfluidic device with channels of height and depth of 300 µm, with a ramp test structure where the height and width of the channels reduces to 100 µm to demonstrate the techniques 3D capabilities. The resulting PDMS device was easily removed from the metallic mould and closely replicated the shape aside the expected shrinkage during thermal curing. As the technique uses a single replica process, the surface roughness at the base of the channels corresponds to the un-ablated polished metal mould, resulting in a very low surface roughness of 0.361 nm. The ablated metallic mould surface corresponds to the top of the PDMS device, which is bonded to glass and does not affect the flow within the channels, reducing the need for optimisation of laser parameters. Finally, the device is validated by demonstrating laminar flow with the no-slip condition.

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Analytical model describing the nonlinear behavior of an elastomeric pump membrane in a microfluidic network

Bott

Dörr

Hoffmann

et al. 2022

Microfluid Nanofluid

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A Novel Approach to Measure the Hydraulic Capacitance of a Microfluidic Membrane Pump

Cited by 4 publications

References 14 publications

Polymer-Based MEMS Electromagnetic Actuator for Biomedical Application: A Review

Polymer-Based MEMS Electromagnetic Actuator for Biomedical Application: A Review

Rapid prototyping method for 3D PDMS microfluidic devices using a red femtosecond laser

Analytical model describing the nonlinear behavior of an elastomeric pump membrane in a microfluidic network

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