2022
DOI: 10.3390/mi13101719
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A Novel Approach for Measurement of Free-Form Optical Elements with Digital Holographic Microscopy

Abstract: Free-form optical elements face significant challenges in high-precision measurement due to their high complexity and non-rotational symmetry. Digital holographic microscopy (DHM), as one of the methods for the measurement of free-form optical elements, has promising applications due to its ultra-high precision and non-destructive and fast characteristics. Therefore, we have designed a novel measurement method that combines transmission DHM and reflection DHM to obtain thickness information and surface informa… Show more

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“…Digital holography (DH) has become a rapidly developing technique for 3D shape measurement in recent years and is increasingly used in the fields of microscopic imaging [1,2], microstructure surface measurement [3], and living cell analysis [4,5]. Slightly off-axis digital holography (SODH) has gained increased attention because it is faster than on-axis DH in reconstructing images and achieves better resolution of reconstructed images than off-axis DH.…”
Section: Introductionmentioning
confidence: 99%
“…Digital holography (DH) has become a rapidly developing technique for 3D shape measurement in recent years and is increasingly used in the fields of microscopic imaging [1,2], microstructure surface measurement [3], and living cell analysis [4,5]. Slightly off-axis digital holography (SODH) has gained increased attention because it is faster than on-axis DH in reconstructing images and achieves better resolution of reconstructed images than off-axis DH.…”
Section: Introductionmentioning
confidence: 99%