2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS) 2015
DOI: 10.1109/transducers.2015.7180988
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A normally closed MEMS micro reed switch with fill in liquid metal micro hinge structure

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Cited by 2 publications
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“…The micromechanical structures (so-called MEMS connectors) are also of great importance. Volume of their magnetic driving systems does not exceed 2–3 mm 3 [4,5,6,7,8,9,10]. It should be emphasized that the use of micro-machine technology allowed for a significant miniaturization of the various device structures, for example the reed contacts of about 2 × 1.4 × 0.75 mm [11,12].…”
Section: Introductionmentioning
confidence: 99%
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“…The micromechanical structures (so-called MEMS connectors) are also of great importance. Volume of their magnetic driving systems does not exceed 2–3 mm 3 [4,5,6,7,8,9,10]. It should be emphasized that the use of micro-machine technology allowed for a significant miniaturization of the various device structures, for example the reed contacts of about 2 × 1.4 × 0.75 mm [11,12].…”
Section: Introductionmentioning
confidence: 99%
“…An interesting product is a miniature switch with a ferromagnetic ball of a diameter of 2–3 mm that serves as the magnetic system as well as the electrical contact [13]. The control of all above-mentioned devices is by means of a DC magnetic field produced by coils (also made by an electron beam technology [6,9,10,14]) and/or by the movable permanent magnets [1,2]. It should be emphasized however, that in the case of the permanent magnets, the increase of the sensitivity with simultaneous miniaturization requires the minimized length of the so-called “differential movement” of the control element (s) [3,15].…”
Section: Introductionmentioning
confidence: 99%