2003
DOI: 10.1016/s0921-4526(03)00268-0
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A new X-ray transmission-reflection scheme for the study of deeply buried interfaces using high-energy microbeams

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Cited by 73 publications
(53 citation statements)
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“…x-ray reflectivity measurements were performed at the high-energy beamline ID15A, European Synchrotron Radiation Facility, using the surface and interface scattering instrument HEMD for high-energy microdiffraction (30). A sketch of the experimental setup is shown in Fig.…”
Section: Methodsmentioning
confidence: 99%
“…x-ray reflectivity measurements were performed at the high-energy beamline ID15A, European Synchrotron Radiation Facility, using the surface and interface scattering instrument HEMD for high-energy microdiffraction (30). A sketch of the experimental setup is shown in Fig.…”
Section: Methodsmentioning
confidence: 99%
“…This technique measures the Fourier transform of the laterally averaged electron density distribution in the surface normal direction. For a direct observation of the molecular structure of the buried interface, penetrating, high-energy x-ray beams are necessary (22). We have used beamline X-22A at the National Synchrotron Light Source of the Brookhaven National Laboratory, with an energy of 32 keV and a beam cross section of 0.1 ϫ 0.5 mm 2 .…”
Section: Resultsmentioning
confidence: 99%
“…The chamber is developed for use on the high energy micro diffraction (HEMD) stage [5,6] at the high energy beamline (ID15) of the European Synchrotron Radiation Facility (ESRF). The HEMD setup is presented in figure 1.…”
Section: The Beamlinementioning
confidence: 99%
“…an MOCVD GaN buffer layer on 1 inch sapphire, or an ammonothermally grown 1 inch wafer) which is placed on the top heater in the chamber can act as a smooth surface on which to perform surface diffraction. A well collimated 70 keV X-ray micro-beam can then impinge the crystal from one side (see figure 5) and penetrate unrefracted down to the buried interface [5]. The reflected beam which carries information from the buried interface leaves the crystal on the other side after a full transmission and may be detected in a standard way.…”
Section: The Chambermentioning
confidence: 99%
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