A new vacuum interferometric comparator for calibrating the fine linear encoders and scales

A three-axis autocollimator for detection of angular error motions of a precision stage

“…Based on the Abbe principle, the measuring axis of the position sensor, typically a linear encoder or a laser interferometer, is required to be aligned coaxially with the axis of motion of the object to avoid the Abbe error caused by angular error motions of the stage [4][5][6]. The positioning systems for ultra-precision metrological applications, such as the line scale comparator and the metrological scanning probe microscope, are basically designed to obey the Abbe principle [7,8]. Many other positioning systems, such as those for machine tools and coordinate measuring machines (CMMs), however, do not satisfy the Abbe principle [9,10].…”

Measurement technologies for precision positioning

“…A few 1D high precision measurement comparators using vacuum interferometry have been developed, which achieve measurement uncertainties of a few nm over length ranges of about 500 mm [57,184,204]. Fig.…”

Dynamics of a Carriage System of Comparator for Calibrating the Line Standards of Length

“…The meter is the most commonly used length measurement unit and the need for reliable, precise measurements to ensure unity of measurements worldwide constantly grows. Recently, linear displacement transducers increasingly have been used to precisely measure displacements, particularly in automated industrial equipment (Sawabe et al 2004;Thalmann 1997). At present, line standards technology is well developed, and precise scales and gratings have replaced interferometers in displacement measuring systems (Demarest 1998;Jakstas et al 2014;Kasparaitis et al 2012;Kasparaitis et al 2015).…”