A new ultrafine groove fabrication method utilizing electron cyclotron resonance plasma deposition and reactive ion etching

Ohki, Shigehisa; Oda, Masanobu; Shibata, Toshitaka

doi:10.1116/1.584064

Cited by 2 publications

(1 citation statement)

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“…In addition, these plasmas may be used for deposition of SiO SiN,, and SiC (Ohki et al, 1988). Initially, they were used in ion …”

Section: Microwave Electron Cyclotron Resonance Plasmasmentioning

confidence: 99%

Beam Technologies for Integrated Processing

1992

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Public reporting burden for ths collectiom of information i estimated to average 1 hour per response. icluing the time for reviewing humuctiom. searching existing data solutions. gathering and maintaining the data needed. and correlating ad reviewing the collection of infonmation. 92-17504-. 04The project that is the subject of this report was approved by the Governing Board of the National Research Council, whose members are drawn from the councils of the National Academy of Sciences, the National Academy of Engineering, and the Institute of Medicine. The members of the committee responsible for the report were chosen for their special competences and with regard for appropriate balance.This report has been reviewed by a group other than the authors according to procedures approved by a Report Review Committee consisting of members of the National Academy of Sciences, the National Academy of Engineering, and the Institute of Medicine.The National Academy of Sciences is a private, nonprofit, self-perpetuating society of distinguished scholars engaged in scientific and engineering research, dedicated to the furtherance of science and technology and to their use for the general welfare. Upon the authority of the charter granted to it by the Congress in 1863, the Academy has a mandate that requires it to advise the federal government on scientific and technical matters. Dr. Frank Press is president of the National Academy of Sciences.The National Academy of Engineering was established in 1964, under the charter of the National Academy of Sciences, as a parallel organization of outstanding engineers. It is autonomous in its administration and in the selection of its members, sharing with the National Academy of Sciences the responsiblity for advising the federal government. The National Academy of Engineering also sponsors engineering programs aimed at meeting national needs, encourages education and research, and recognizes the superior achievements of engineers. Dr. Robert M. White is president of the National Academy of Engineering.The Institute of Medicine was established in 1970 by the National Academy of Sciences to secure the services of eminent members of appropriate professions in the examination of policy matters pertaining to the health of the public. The Institute acts under the responsibility given to the National Academy of Sciences by its congressional charter to be an advisor to the federal government and, upon its own initiative, to identify issues of medical care, research, and education. Dr. Kenneth I. Shine is president of the Institute of Medicine.The National Research Council was organized by the National Academy of Sciences in 1916 to associate the broad community of science and technology with the Academy's purposes of furthering knowledge and advising the federal government. Functioning in accordance with general policies determined by the Academy, the Council has become the principal operating agency of both the National Academy of Sciences and the National Academy of Engineering in provi...

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“…In addition, these plasmas may be used for deposition of SiO SiN,, and SiC (Ohki et al, 1988). Initially, they were used in ion …”

Section: Microwave Electron Cyclotron Resonance Plasmasmentioning

confidence: 99%