A new type of wide-range vacuum sensor

Deulin, E. A.; Galakhar, Alexander S.; Basmanov, Mikhail S.

doi:10.1109/icit.2009.4939520

2009 IEEE International Conference on Industrial Technology 2009

DOI: 10.1109/icit.2009.4939520

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A new type of wide-range vacuum sensor

E. A. Deulin

Alexander S. Galakhar

Mikhail S. Basmanov

Abstract: This work is focused on simplification of a residual pressure measurement. The presented simple and reliable tribology based vacuum sensor allows measuring of the residual pressure in the range of 10 5 Pa to 10-10 Pa. It can substitute all other high and ultrahigh vacuum gauges with itself.

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A new type of wide-range vacuum sensor

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References 4 publications

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