A new three‐dimensional 30 GHz bandpass filter using the LIGA micromachined process

Abstract

In this letter, a new micromachined 3‐D bandpass filter in the Ka‐band is proposed using the LIGA process. The characteristic impedance and design parameters for the 3‐D filter are determined from the experimental results and the filter design rule. The filter shows a wide‐bandpass characteristic of 39%, with an insertion loss of 1.7 dB at 33.2 GHz, and can be applicable in high‐power MMICs. © 2001 John Wiley & Sons, Inc. Microwave Opt Technol Lett 30: 199–201, 2001.

Micromachined Millimeter-wave Ridge Waveguide Filter with Embedded MEMS Tuning Elements

“…Over the pass few years, several research groups have demonstrated different kinds of micromachined filters with excellent performance [3][4][5][6][7]. IEMS filters with substantial loss reduction were achieved by partially removing substrates [3] or fabricating the entire filter on suspended thin dielectric films [4].…”