A new test facility for efficient evaluation of MEMS contact materials

Yang, Zhiyao; Lichtenwalner, Daniel J.; Morris, Arthur S.; Menzel, Stephan; Nauenheim, C.; Gruverman, Alexei; Krim, J.; Kingon, Angus I.

doi:10.1088/0960-1317/17/9/006

Cited by 38 publications

(32 citation statements)

References 18 publications

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“…3 and 1 GHz, -10 dBm RF input signal. It is expected that switch resistance will decrease to a stable value during the initial cycling [6]. A measured example of this behavior is shown in Fig.…”

Section: System Resultsmentioning

confidence: 94%

High-Speed, single-cycle-resolution reliability system for RF-MEMS switches

Proie¹,

Ivanov²

2011

2011 IEEE MTT-S International Microwave Symposium

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Section: System Resultsmentioning

confidence: 94%

High-Speed, single-cycle-resolution reliability system for RF-MEMS switches

Proie¹,

Ivanov²

2011

2011 IEEE MTT-S International Microwave Symposium

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“…R C and F C ) to determine their performance [10][11][12][13][14]. These methods, however, have some severe limitations.…”

Section: Micro-contacts Test Fixturementioning

confidence: 99%

Micro-Contacts Testing using a Micro-Force Sensor Compatible with Biological Systems

Coutu¹,

Tomer²

2017

IJBSBE

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This paper presents the performance and reliability testing of microelectromechanical systems (MEMS) switches by using a micro-force sensor which was originally designed/used to conduct mechanical testing of biological cells. MEMS switches are key components for radio frequency (RF) applications due to their extremely low power consumption and small geometries over conventional technologies. However, unstable electrical contact resistance severely degrades the performance and reliability of such micro-switches. Therefore, our focus is to improve the performance and reliability of "cold" switched micro-contacts by using novel contact materials and engineered micro-contact surfaces. The contact metallurgies considered in this work are "similar" thin film combinations of Au, and composite Au/CNT. The nonengineered switch consists of a metallic hemispherical bump and a planar sheet as upper and lower contacts, respectively. On the other hand, the engineered switches have 2D pyramid structure in lower contacts while having a hemispherical bump at upper contact. Hemisphere on planar, Au-Au, contact pairs resulted in initial contact resistance (R C ) values of ~0.1Ω (F C = 200µN) that linearly increased to ~1.0Ω after ~10×10 6 cycles and then failed open (~10.0Ω) at ~20×10 6 switching cycles. The AuAu/CNT composite, hemisphere on planar contact pair showed similar R C performance with extended reliability (~40×10 6 switching cycles) when the composite film was integrated into the lower planar contacted. Upper hemisphere on the 2D pyramid, Au-Au, contact pairs resulted in initial R C values of ~0.9Ω (F C = 200µN) that linearly decreased to ~0.5Ω at >10×10 6 cycles (not failed). This work suggests that the combination of engineered lower contacts and composite materials can significantly improve the performance and reliability of micro-switches.

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“…electric motor was expected to surpass the rate limitations of the AFM [1]. The ability to apply a known contact force enables greater accuracy for determining micro-contact resistance and is the reason that AFMs are employed for testing [2]. By using a piezo electric actuator with a high-sample rate capable force sensor instead of an AFM, there was no expected decrease in micro-contact force accuracy.…”

Section: Introductionmentioning

confidence: 99%

Contact resistance evolution of highly cycled, lightly loaded micro-contacts

Stilson¹,

Coutu²

2014

SPIE Proceedings

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Reliable microelectromechanical systems (MEMS) switches are critical for developing high performance radio frequency circuits like phase shifters. Engineers have attempted to improve reliability and lifecycle performance using novel contact metals, unique mechanical designs and packaging. Various test fixtures including: MEMS devices, atomic force microscopes (AFM) and nanoindentors have been used to collect resistance and contact force data. AFM and nanoindentor test fixtures allow direct contact force measurements but are severely limited by low resonance sensors, and therefore low data collection rates. This paper reports the contact resistance evolution results and fabrication of thin film, sputtered and evaporated gold, micro-contacts dynamically tested up to 3kHz. The upper contact support structure consists of a gold surface micromachined, fix-fix beam designed with sufficient restoring force to overcome adhesion. The hemisphere-upper and planar-lower contacts are mated with a calibrated, external load resulting in approximately 100µN of contact force and are cycled in excess of 10 6 times or until failure. Contact resistance is measured, in-situ, using a cross-bar configuration and the entire apparatus is isolated from external vibration and housed in an enclosure to minimize contamination due to ambient environment. Additionally, contact cycling and data collection are automated using a computer and LabVIEW. Results include contact resistance measurements of 6 and 8 µm radius contact bumps and lifetime testing up to 323.6 million cycles.

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A new test facility for efficient evaluation of MEMS contact materials

Cited by 38 publications

References 18 publications

High-Speed, single-cycle-resolution reliability system for RF-MEMS switches

High-Speed, single-cycle-resolution reliability system for RF-MEMS switches

Micro-Contacts Testing using a Micro-Force Sensor Compatible with Biological Systems

Contact resistance evolution of highly cycled, lightly loaded micro-contacts

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