A new technique for creating curved interior holes on ultrathin glass based on picosecond laser drilling and thermo-shock separation

Chuang, C-F; Chen, Kuo-Shen

doi:10.1109/dtip.2018.8394207

2018 Symposium on Design, Test, Integration &Amp; Packaging of MEMS and MOEMS (DTIP) 2018

DOI: 10.1109/dtip.2018.8394207

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A new technique for creating curved interior holes on ultrathin glass based on picosecond laser drilling and thermo-shock separation

C-F Chuang

Kuo-Shen Chen

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A new technique for creating curved interior holes on ultrathin glass based on picosecond laser drilling and thermo-shock separation

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References 8 publications

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