A new strategy of binary-size particles model for fabricating fine grain, high density and low resistivity ITO target

Zhai, Xiaoyu; Chen, Yujie; Ma, Yunqian; Sun, Shichao; Liu, Jiaxiang

doi:10.1016/j.ceramint.2020.02.152

Cited by 17 publications

(9 citation statements)

References 35 publications

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“…12,13 The conventional techniques employed for the preparation of ceramic targets typically involve stamping, molding, hot isostatic pressing, and cold isostatic pressing (CIP). [14][15][16][17] The density and sintering activity of green compacts, which are formed through molding and CIP, exhibit variations depending on the applied pressure. Numerous studies have investigated the impact of green density on the densification process, with Bruch discovering a strong correlation between the densification rate of Al 2 O 3 during the middle and final stages of isothermal sintering and the initial green density.…”

Section: Introductionmentioning

confidence: 99%

Investigate the relationship between densification and grain size of IGZO target by phase‐field simulation

Liu,

Sun,

Zhang

et al. 2024

J Am Ceram Soc.

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The phase‐field method was employed to simulate the effects of pores on grain growth in the indium gallium zinc oxide (IGZO) targets during conventional and two‐stage sintering (TSS). The findings indicated that the TSS method effectively suppressed the rapid growth of grains. With an increase in porosity and a more prominent pore size, the rate of grain growth accelerated, resulting in the formation of coarser grains. Subsequently, IGZO targets were fabricated using the molding‐cold isostatic pressing (CIP) and TSS methods. The densification activation energies of IGZO green compacts were calculated to be 510 and 370 kJ/mol for CIP at 180 and 250 MPa, respectively, utilizing the main sintering curve (MSC). Additionally, by optimizing the TSS process, a highly dense IGZO target with a relative density of 99.53%, a resistivity of 4.3 mΩ/cm, and an average grain size of 8.59 µm was successfully achieved.

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Section: Introductionmentioning

confidence: 99%

Investigate the relationship between densification and grain size of IGZO target by phase‐field simulation

Liu,

Sun,

Zhang

et al. 2024

J Am Ceram Soc.

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“…H Y Xu et.al [22] utilized the same way to synthesize the Al2O3 dense fine-grained ceramics by 3 μm and 220 nm Al2O3 powders, whose relative density is 92.2% and grain size is 250 nm. The researchers found that when combining two sizes of powders, the key point is that the sizes must meet the requirements of the close-packed model, because it can maximize the space utilization [23][24][25][26][27]. X Y Zhai et.al [23] and Q Jin et.al [24] have achieved indium tin oxide (ITO) and BaTiO3 fine-grained ceramics with high relative density under conventional sintering conditions, respectively.…”

Section: Introductionmentioning

confidence: 99%

“…Studies have shown that using the intrinsic properties of powders, such as morphology, size and so on, through the combination of powders with different sizes then co-sintering, the contradiction between densification and grain growth can be balanced [18][19][20][21][22][23][24]. Consequently, the fine-grained ceramics with high relative density can be obtained by sintering under conventional conditions [20][21][22][23][24]. For example, J W Oh et.al [21] used the Fe powders with sizes 3 μm and 100 nm to co-sintering.…”

Section: Introductionmentioning

confidence: 99%

“…The researchers found that when combining two sizes of powders, the key point is that the sizes must meet the requirements of the close-packed model, because it can maximize the space utilization [23][24][25][26][27]. X Y Zhai et.al [23] and Q Jin et.al [24] have achieved indium tin oxide (ITO) and BaTiO3 fine-grained ceramics with high relative density under conventional sintering conditions, respectively. They considered that this method is similar to the self-assembly process of colloidal crystal, and named this way as a self-assembly sintering method [24].…”

Section: Introductionmentioning

confidence: 99%

“…They considered that this method is similar to the self-assembly process of colloidal crystal, and named this way as a self-assembly sintering method [24]. What is more, researchers have pointed out the requirements met by the two sizes of powders and their reasonable ratios by the calculations of close packing model, and gave the general conditions for this method [22][23][24].…”

Section: Introductionmentioning

confidence: 99%

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Densification and fine grain formation mechanisms of BaTiO3 ceramics consolidated by self-assembly sintering

Jin¹,

Zhao²,

Zhang³

et al. 2021

Preprint

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In this paper, from the perspective of thermodynamics and kinetics, we have studied the mechanism of balancing the densification and grain growth via co-sintering the micron and nano powders, also known as self-assembly sintering. In the experiment, the 200 nm and 80 nm BaTiO 3 spherical powders were used as models for combination and co-sintering. In terms of thermodynamics, the contact angle method is applied to determine the free energy of the binary particle size system. The surface free energy of 200 nm and 80 nm BaTiO 3 powders are 51.66 J/mol and 203.47 J/mol, respectively. When the powder ratio is 1:1, the surface free energy of the binary particle size system is 127.56 J/mol, which is the reason for the balance between densification and grain growth. In terms of kinetics, the Arrhenius equation was utilized to calculate the apparent activation energy ( Q ) of the binary particle size system. The results show that the value of Q is 360 kJ/mol at 1000 °C. The fine-grained ceramics with high relative density obtained by this sintering method at a low sintering temperature (1000 °C) can be explained by the relative low value of Q.

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Densification and fine-grain formation mechanisms of BaTiO3 ceramics consolidated by self-assembly sintering

Jin

Zhao

Zhang

et al. 2021

J Mater Sci: Mater Electron

View full text Add to dashboard Cite

In this paper, from the perspective of thermodynamics and kinetics, we have studied the mechanism of balancing the densification and grain growth via co-sintering the micron and nano powders, also known as self-assembly sintering. In the experiment, the 200 nm and 80 nm BaTiO3 spherical powders were used as models for combination and co-sintering. In terms of thermodynamics, the contact angle method is applied to determine the free energy of the binary particle size system. The surface free energy of 200 nm and 80 nm BaTiO3 powders are 51.66 J/mol and 203.47 J/mol, respectively. When the powder ratio is 1:1, the surface free energy of the binary particle size system is 127.56 J/mol, which is the reason for the balance between densification and grain growth. In terms of kinetics, the Arrhenius equation was utilized to calculate the apparent activation energy (Q) of the binary particle size system. The results show that the value of Q is 360 kJ/mol at 1000 °C. The fine-grained ceramics with high relative density obtained by this sintering method at a low sintering temperature (1000 °C) can be explained by the relative low value of Q.

show abstract

A new strategy of binary-size particles model for fabricating fine grain, high density and low resistivity ITO target

Cited by 17 publications

References 35 publications

Investigate the relationship between densification and grain size of IGZO target by phase‐field simulation

Investigate the relationship between densification and grain size of IGZO target by phase‐field simulation

Densification and fine grain formation mechanisms of BaTiO3 ceramics consolidated by self-assembly sintering

Densification and fine-grain formation mechanisms of BaTiO3 ceramics consolidated by self-assembly sintering

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