A new piezodriven precision micropositioning stage utilizing flexure hinges

Abstract

A precision micropositioning system with a high displacement resolution and wide motion range has been required for industrialized applications for a long time. This paper discusses the design and the characteristics of a new piezodriven precision micropositioning stage utilizing flexure hinges. Two-grade amplifying and a monolithic symmetrical mechanism are adopted in the design. An analytical model is presented and a series of formulae for the static and dynamic behaviour of the stage are derived. Based on the theoretical analysis, the optimum design schema is put forward. The experimental demonstration to study the performance of the stage is described, and the method for reducing nonlinearity errors is proposed. The experimental results are in close agreement with those predicted by the theoretical analysis.

A one-piece 3D printed flexure translation stage for open-source microscopy

“…This is effective in very stiff metal designs 17 but would result in a very large planar structure for the range of motion we require. Such a structure, printed in plastic, would have unacceptably low stiffness out of the plane (i.e., in the focus direction).…”

Development of a XYθz 3-DOF nanopositioning stage with linear displacement amplification device

“…Positioning systems play a fundamental role within nanotechnology applications, and therefore they are attracting an ever-increasing amount of interest within academic circles and in a variety of research units [1][2][3][4][5][6][7][8][9].…”

A Compact 2-DOF Piezoelectric-Driven Platform Based on “Z-Shaped” Flexure Hinges

“…Meanwhile, it also greatly limits the application in 3D cellular bio-assembly systems [8,[21][22][23]. To overcome these shortcomings, one or more motion degrees of freedom are nested inside one basic motion to achieve the nested form platforms [24][25][26]. Nevertheless, most of the previous nested form piezoelectric-driven platforms utilize the basic right-angle and right-circle flexure hinges, which causes great structural stress and influences the whole working lifetime.…”