A New Model with Feedback Structure for Thermal Process and its Application to Decoupling Control

Experimental study on uniform temperature control for two-dimensional heating plate control

“…To deal with these problems, we have proposed the temperature difference model (TDM) for thermal process [5]. The feature of this model is to represent thermal interference explicitly with the feedback temperature difference.…”

“…The feature of this model is to represent thermal interference explicitly with the feedback temperature difference. And decoupling control and uniform control based on the TDM have been developed for onedimensional heating plate [5], [6]. However, the control system for practical two-dimensional heating plate has not been discussed yet.…”

Experimental Study on Uniform Heating Control based on Temperature Difference Model

“…To deal with these problems, we have propsed a new model of thermal process which is named temperature difference model (TDM) [7]. This model explicitly represents thermal interference with the feedback temperature diference.…”

“…This model explicitly represents thermal interference with the feedback temperature diference. We have verified that decoupling control and uniform control based on the TDM can be designed [7],[8], but the transient temperature uniformity has not been shown by experiment.…”

“…THERMAL PROCESS MODEL WITH FEEDBACK STRUCTURE [7] A. Physical modeling of the thermal process For simplification, we assume that the controlled object is composed two small volume cell, and that temperature distribution in each cell is uniform.…”