2012
DOI: 10.4028/www.scientific.net/amm.268-270.382
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A New Method of Processing High-Precision Micro-Hole with the Femtosecond Laser

Abstract: Based on the femtosecond laser processing technology and PZT driving scanning technology,high-precision micro- manufacturing technology is developed. By adjusting the laser parameters and scanning parameters to get micro-hole machining on the flat or curved surface. Hole’s size and surface morphology is observed by using phase contrast microscopy and scanning electron microscopy observations, and the surface roughness is analyzed by the surface profile instrument. The feasibility of diesel injector nozzle proc… Show more

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“…The advantages include reduction of heat-affected zone formation around the irradiated area, high spatial resolution beyond the diffraction limit and versatility in terms of the materials that can be processed (Chichkov et al, 1996;Gattass and Mazur, 2008;Sugioka and Cheng, 2014). Therefore, fs laser has been extensively exploited to process micro/nano structure on metallic material (Yang et al, 2013;Jung-Kyu et al, 2012;Ahmmed et al, 2014). Femtosecond laser surface processing became one of the best ways to create surface structures at nano-and micro-scales on metals due to its flexibility, simplicity and controllability in creating various types of nano/ microstructures that are suitable for a wide range of applications (Anatoliy and Guo, 2013).…”
Section: Introductionmentioning
confidence: 99%
“…The advantages include reduction of heat-affected zone formation around the irradiated area, high spatial resolution beyond the diffraction limit and versatility in terms of the materials that can be processed (Chichkov et al, 1996;Gattass and Mazur, 2008;Sugioka and Cheng, 2014). Therefore, fs laser has been extensively exploited to process micro/nano structure on metallic material (Yang et al, 2013;Jung-Kyu et al, 2012;Ahmmed et al, 2014). Femtosecond laser surface processing became one of the best ways to create surface structures at nano-and micro-scales on metals due to its flexibility, simplicity and controllability in creating various types of nano/ microstructures that are suitable for a wide range of applications (Anatoliy and Guo, 2013).…”
Section: Introductionmentioning
confidence: 99%