A new method of non-contact gauge block calibration using a fringe-counting technique: I. Theoretical basis

Dobosz, Marek; Iwasińska-Kowalska, Olga

doi:10.1016/j.optlastec.2009.05.012

Cited by 16 publications

(14 citation statements)

References 30 publications

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“…where d is the translation length in m, λ is the wavelength (0.6329908 m) of the unstabilised He-Ne laser in a vacuum [20,21], i is the number of fringes recorded and n is the refractive index calculated by Ciddor's equation [23]. The measurement using wavelength is influenced by the refractive index, where the refractive index is also influenced by the medium [24][25][26].…”

Section: Methodsmentioning

confidence: 99%

Linear Motion Error Evaluation of Open-Loop CNC Milling Using a Laser Interferometer

Winarno

Prayoga

Hendaryanto

2022

Acta Mechanica Et Automatica

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The usage of computerised numerical control (CNC) machines requires accuracy verification to ensure the high accuracy of the processed products. This paper introduces an accuracy verification method of an open-loop CNC milling machine using a fringe counting of He–Ne laser interferometry to evaluate the best possible accuracy and functionality. The linear motion accuracy of open-loop CNC milling was evaluated based on the number of pulses from the controller against the actual displacement measured by the He–Ne fringe-counting method. Interval distances between two pulses are also precisely measured using the He–Ne interferometry. The linear motion error and controller error can be simultaneously evaluated in sub-micro accuracy. The linear positioning error due to the micro-stepping driver accuracy of the mini-CNC milling machine was measured with the expanded uncertainty of measurement and was estimated at 240 nm. The experimental results show that linear motion error of the open-loop CNC milling can reach up to 50 μm for 200 mm translation length.

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Section: Methodsmentioning

confidence: 99%

Linear Motion Error Evaluation of Open-Loop CNC Milling Using a Laser Interferometer

Winarno

Prayoga

Hendaryanto

2022

Acta Mechanica Et Automatica

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“…For nonabsorbing materials in the first three rows, zero phase change is expected and only the combined effect of deformation and roughness is measured. For the steel samples in the last two rows the apparent optical distance 17.6 nm (according to (2) for 633 nm wavelength) is added to the calculated deformation (6). Optical distance: OD raw -measured (uncorrected), OD ∆ -discrepancy from zero-roughness model; change of compression with increased force: CC M -measured, CC C -calculated, CC ∆ -measured minus calculated.…”

Section: Size Of Processed Image Areamentioning

confidence: 99%

“…Repeated wringing of gauge blocks causes wear of both the block and the platen, so several non-contact measurement methods, using double-ended interferometry, have been developed [3][4][5][6][7][8][9][10]; here the correction becomes even more Metrologia Linking the optical and the mechanical measurements of dimension by a Newton's rings method important as it has to be applied twice (once at each end). One of these methods-Fourier transform interferometry [9]-is regularly used in the Czech Metrology Institute (CMI) to calibrate both short and long gauge blocks because it is competitive with comparator measurements while achieving precision comparable to standard interferometric methods.…”

Section: Introductionmentioning

confidence: 99%

“…The section of spherical surface can be fitted well by a paraboloid: for the lenses used the fit residuals are below 1 nm for the section of 6 mm diameter (corresponding to >100 Newton's rings) 6. The central area of the ring system is removed from processing to ensure the result is not affected by deformation of the contact lens, possible contaminants accumulated at the contact and phase change at reflection from a small area where the sample and probing lens are in physical contact.…”

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confidence: 98%

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Linking the optical and the mechanical measurements of dimension by a Newton’s rings method

et al. 2019

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Optical (e.g. interferometric or laser focus probe) measurement of dimensions must be corrected to take into account phase change on reflection and the influence of surface roughness in order to be compatible with mechanical dimension measurement methods (e.g. tactile probes). One typical example is interferometric measurement of a gauge block; while a correction of only a few nanometres is needed for standard interferometric measurement of a gauge block wrung on a platen made of the same material, a correction of tens of nanometres is needed when different materials are used (e.g. a steel gauge block on a glass platen) and even a total correction of up to a hundred nanometres is needed for some gauges when a double-ended interferometer is used. Here we describe and evaluate a Newton's rings method that enables direct estimation of such correction. The implementation of this method is described, the sensitivities to experimental adjustments are discussed, and the results are compared with standard measurements within EURAMET project No. 1272. The resulting central length measured with a double-ended interferometer and corrected using the Newton's rings method agrees well with the standard measurement results within a total uncertainty of ±20 nm for both steel and ceramic gauges. Unlike the stack method, the Newton's rings method enables measurement of the correction for an individual sample (e.g. gauge block) and can easily be done for both short and long gauges with equal speed and uncertainty.

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“…The presented optical setup for contactless gauge block measurement is based on double-ended interferometry combining a laser and a white-light source and it is presented as an alternative to similar configurations published before [4][5][6][7][8]. The key advantage of the presented optical setup is its contactless measurement of the absolute gauge block length done as a single-step measurement giving complete information of the gauge block length, without any additional gauge block manipulation or any length comparison with a reference dimension.…”

Section: Introductionmentioning

confidence: 99%

System for contactless gauge blocks measurement

Buchta

Řeřucha

Mikel

et al. 2013

Eighth International Symposium on Precision Engineering Measurement and Instrumentation

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This paper presents a novel principle for contactless gauge block measurement using a combination of low-coherence interferometry and laser interferometry. The experimental setup combines a Dowell interferometer and a Michelson interferometer to ensure a gauge block length determination with direct traceability to the primary length standard. This setup was designed for contactless complex gauge block analysis providing information about gauge block length, gauge block faces surface profile (e.g., indication of scratches) and by analysis of the interference fringes shape, also about the gauge block edge flatness distortion. The designed setup is supplemented by an automatic handling system designed for a set of 126 gauge blocks (0.5 mm to 100 mm) to allow the automatic contactless calibration of the complex gauge block set without a human operator.

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A new method of non-contact gauge block calibration using a fringe-counting technique: I. Theoretical basis

Cited by 16 publications

References 30 publications

Linear Motion Error Evaluation of Open-Loop CNC Milling Using a Laser Interferometer

Linear Motion Error Evaluation of Open-Loop CNC Milling Using a Laser Interferometer

Linking the optical and the mechanical measurements of dimension by a Newton’s rings method

System for contactless gauge blocks measurement

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