2001
DOI: 10.1109/58.911746
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A new method for continuous monitoring of series resonance frequency and simple determination of motional impedance parameters for loaded quartz-crystal resonators

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Cited by 39 publications
(22 citation statements)
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“…If an impedance analyzer is not available, the corresponding standard [34], or an alternative method described elsewhere [35], can be used. A more accurate determination of Co can be made at a frequency as high as the double of the resonant frequency [36].…”
Section: Qcm Sensor Parametersmentioning
confidence: 99%
“…If an impedance analyzer is not available, the corresponding standard [34], or an alternative method described elsewhere [35], can be used. A more accurate determination of Co can be made at a frequency as high as the double of the resonant frequency [36].…”
Section: Qcm Sensor Parametersmentioning
confidence: 99%
“…As shown in figure 1, the FTO consists of a circuit to cancel the inter-electrodes capacitance, a charge amplifier and a Phase Locked Loop (mixer, corrector and VCO) to control the zero phase shift over the resonator and thus to track its resonance frequency. The FTO is commonly used for MEMS vibrating sensors, its benefits have been demonstrated for QCM sensors [1,2], MEMS gyroscopes [3] and MEMS accelerometers [4], and the FTO also allows including self-test loops in the oscillator [5,6]. Studies have been undertaken to model the FTO in order to set properly the corrector parameters [7,8,9,10].…”
Section: Introductionmentioning
confidence: 99%
“…For example, ultrasonic motors, piezoelectric transducers, induction heating loads, resonant inverter loads, microelectromechanical gyroscopes, cavity resonators, cyclotrons and second order bandpass filters can be modeled as resonant systems (lightly damped series or parallel RLC circuits). [1][2][3][4][5][6][7][8][9][10][11][12][13][14][15][16] In order to achieve optimal performance (maximum power transmission, resonance amplification or signal selectivity), the resonant frequency of such a system must be matched to its excitation frequency. [1][2][3][4][5][6][7][8][9][10][11][12][13][14][15][16] However, disturbances such as environmental change, load variation, manufacturing variability, aging, fatigue damage, microphonics or electromagnetic detuning [1][2][3][4][5][6][7][8][9][10][11][12][13][14]…”
Section: Introductionmentioning
confidence: 99%