Abstract:Modeling and simulation of MEMS devices is a very complex tasks which involve the electrical, mechanical, fluidic, and thermal domains, and there are still some uncertainties that need to be accounted for during the robust design of MEMS actuators caused by uncertain material and/or geometric parameters. According to these problems, we put forward stochastic model order reduction method under random input conditions to facilitate fast time and frequency domain analyses; the method makes use of polynomial chaos… Show more
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