A new machine for metal surface treatment by dynamic mixing using a high current ion source

Abstract

A new machine has been made for practical metal surface treatment with simultaneous ion implantation and metal vapor deposition (dynamic mixing) by using a high current ion source. The machine has a bucket-type ion source, electron beam evaporator, water-cooled rotary specimen holder, and film thickness monitor. The ion energy is variable in the region 4–40 kV and the total beam current for nitrogen is over 600 mA. The beam diameter is about 10 cm. The machine has no magnet for mass analysis. The power supply of the ion source has a high voltage, high speed switch for the gate turn-off thyrister to protect and improve the ion source capability by conditioning. The machine was applied to surface treatment of an aluminum alloy at room temperature and improved wear resistance was obtained for the samples.