2013 Transducers &Amp; Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems 2013
DOI: 10.1109/transducers.2013.6627133
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A new intracranial pressure sensor on polyimide lab-on-a-tube using exchanged polysilicon piezoresistors

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Cited by 7 publications
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“…A polysilicon-diaphragm-based pressure sensor was embedded on a flexible polyimide substrate [7]. Temperature and cerebral blood flow microsensors were based on micromachined gold resistance temperature detectors with a 4-wire configuration [8].…”
Section: Methodsmentioning
confidence: 99%
“…A polysilicon-diaphragm-based pressure sensor was embedded on a flexible polyimide substrate [7]. Temperature and cerebral blood flow microsensors were based on micromachined gold resistance temperature detectors with a 4-wire configuration [8].…”
Section: Methodsmentioning
confidence: 99%