A New Flexure-Based <inline-formula><tex-math notation="LaTeX">$Y\theta$</tex-math></inline-formula> Nanomanipulator With Nanometer-Scale Resolution and Millimeter-Scale Workspace

Abstract

In this paper, the development of a flexure-based twodegree-of-freedom (2-DOF) nanomanipulator with modified differential lever displacement amplifier is conducted, which aims to break through the millimeter-range barrier. The kinetostatics modeling of the mechanism is established by using the pseudorigid body method, also the analytical modeling of lever is built up, as well as the dimension optimizations and the mechanism performance validations are conducted by using the Particle Swarm Optimization algorithm and the finite-element analysis method, respectively. With the consideration of hysteresis effect inherent in piezoelectric ceramics actuators, the hysteresis modeling is conducted by using the Preisach theory. To enhance the mechanism positioning performance, a novel feedforward nonlinear proportionintegration-differentiation control strategy composed by the nonlinear PID controller and the inverted Preisach hysteresis compensator is proposed in this paper. Finally, a series of closed-loop motion tracking experiments have been carried out. It indicates that the developed mechanism has achieved a millimeter workspace (3.1273 mm × 26.5 • ), nanometer scale motion resolution (40 nm), as well as a closed-loop positioning bandwidth of over 10 Hz.Index Terms-Feedforward nonlinear PID (FNPID), hysteresis compensator, lever displacement amplifier, nanomanipulator, pseudorigid body.

Kinetostatic and Dynamic Modeling of Flexure-Based Compliant Mechanisms: A Survey

“…Moreover, the modeling accuracy is also limited with some of the previous studies. In recent years, there are increasingly dynamic applications of flexure-based manipulators with intermediate or even large deflection ranges, such as large-workspace precision grippers [47][48][49][50]284]. To satisfy these emerging requirements, more effort should be devoted to developing dynamic modeling methods for compliant mechanisms with intermediate and large deflections as well as revealing dynamic characteristics and new behaviors.…”

“…A majority of the present fully compliant mechanisms are designed with small deflection but serial-parallel configurations increase the kinetostatic and dynamic modeling complexity. On the other hand, nonlinearities in modeling compliant mechanisms with intermediate or large deflections pose design challenges for some newly emerging dynamic applications with large workspaces [46][47][48][49][50].…”

Displacement amplification ratio modeling of bridge-type nano-positioners with input displacement loss

“…It should be pointed out that the direct output displacement of a piezoelectric actuator is about one thousandth of its own length, which usually can not meet the requirements of large working range in most cases. Amplifying mechanism is typically employed to amplify and transmit displacement, such as lever mechanism (Xing, 2015;Tang and Li, 2015;Tang et al, 2018), Scott-Russell mechanism (Tian et al, 2009), rhombic mechanism (Ling et al, 2018), bridge-type mechanism (Li and Xu, 2011;Chen et al, 2018;Clark et al, 2018). Among various amplifying mecha-nisms, bridge-type mechanism was widely investigated due to its characteristics of high amplification ratio, compact structure and easy processing.…”

Design and optimization of full decoupled micro/nano-positioning stage based on mathematical calculation

“…At present, some amplifiers between the actuator and motion stage have also been proposed to overcome the disadvantage of small output displacement. Such as the lever displacement amplifiers (Tang and Li, 2015) and bridge-type amplifiers (Wu and Li, 2014) are commonly used as the bridge for amplifying the output displacements.…”