Microwave spectra have been measured for a number of isotopically substituted forms of methyl fluoroform, methyl trifluorosilane and trifluoromethyl cyanide. By measurement of the J = 4 → 5 transitions of molecules containing partially deuterated methyl groups, it is possible to derive all three principal moments of inertia of these species with a precision sufficient for structural calculations. The structures of methyl fluoroform and trifluoromethyl cyanide obtained from these measurements are discussed. In trifluoromethyl cyanide, the CN bond is somewhat shorter than usually found for this group. Spectra of these molecules in excited vibrational states are also briefly reported.