A new design of Electrostatic Traveling Wave (ETW) micropump and the effect of parameters on the flow rate

Shirkosh, Mohammad; Hojjat, Yousef; Sadeghian, Hesam

doi:10.1016/j.flowmeasinst.2016.01.005

Cited by 5 publications

(4 citation statements)

References 13 publications

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“…Micropumps are usually manufactured through MEMS technologies, using biocompatible substrates composed of silicon, glass, polymethylmethacrylate, polydimethylsiloxane, or SU-8 photoresists [120]. Generally, they can be divided into mechanical micropumps, which contain mechanical moving parts such as valves or diaphragms for applying forces to working fluids through moving boundaries between the solid and liquid phases, and non-mechanical micropumps, which convert a considerable amount of non-mechanical energy into kinetic momentum to move the fluid along the channel [120,123,124]. Mechanical micropumps require different types of actuation mechanisms, such as electrostatics, piezoelectricity, thermo-pneumatics, bimetallic electro-thermal expansion, shape-memory effects, or ionic conductive polymer films (Figure 8, Table 1) [125][126][127].…”

Section: Micropumpsmentioning

confidence: 99%

“…There are several key parameters that could affect the performance of non-mechanical micropumps. Specifically, the intensity of the electric field, which is dependent on the applied voltage, the frequency, and profile of the traveling wave, the type of fluid, the number of traveling wave phases, the gap size between the electrodes and their width, and the dimensions of the channels must be considered when designing non-mechanical micropumps [124].…”

Section: Micropumpsmentioning

confidence: 99%

“…Therefore, fluid motion necessitates the presence of an electric field, obtained through the exertion of a potential difference to an array of electrodes to produce a traveling wave and a space charge, which is achieved by using non-homogeneous fluids or by the dissociation or direct charge injection. In this manner, the mechanisms are further classified into induction, conduction, and electrohydrodynamic injection pumping, respectively [124].…”

Section: Electrohydrodynamic Micropumpsmentioning

confidence: 99%

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Microelectromechanical Systems (MEMS) for Biomedical Applications

Chircov

Grumezescu

2022

Micromachines

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The significant advancements within the electronics miniaturization field have shifted the scientific interest towards a new class of precision devices, namely microelectromechanical systems (MEMS). Specifically, MEMS refers to microscaled precision devices generally produced through micromachining techniques that combine mechanical and electrical components for fulfilling tasks normally carried out by macroscopic systems. Although their presence is found throughout all the aspects of daily life, recent years have witnessed countless research works involving the application of MEMS within the biomedical field, especially in drug synthesis and delivery, microsurgery, microtherapy, diagnostics and prevention, artificial organs, genome synthesis and sequencing, and cell manipulation and characterization. Their tremendous potential resides in the advantages offered by their reduced size, including ease of integration, lightweight, low power consumption, high resonance frequency, the possibility of integration with electrical or electronic circuits, reduced fabrication costs due to high mass production, and high accuracy, sensitivity, and throughput. In this context, this paper aims to provide an overview of MEMS technology by describing the main materials and fabrication techniques for manufacturing purposes and their most common biomedical applications, which have evolved in the past years.

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Section: Micropumpsmentioning

confidence: 99%

Section: Micropumpsmentioning

confidence: 99%

Section: Electrohydrodynamic Micropumpsmentioning

confidence: 99%

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Microelectromechanical Systems (MEMS) for Biomedical Applications

Chircov

Grumezescu

2022

Micromachines

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“…References [1]- [4] For valve-less piezoelectric pump, it is composed of PZT diaphragm and flow jet part. Between the two main components, there are many factors in output performance including channel shapes [4]- [7], chamber configuration [8], [9], structure parameters [10]- [12] and flow channel distribution [13]- [15], etc. Those above are intertwined with the flow rectify ability directly or indirectly.…”

Section: Introductionmentioning

confidence: 99%

Design and Experimental Verification on Characteristics of Valve-Less Piezoelectric Pump Effected by Valve Hole Spacing

Chen

Xie

et al. 2019

IEEE Access

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Valve-less piezoelectric pumps possess the advantages of simple structure and absence of electromagnetic interference, which has accordingly drawn widespread attention. In this paper, in order to improve the performance of valve-less piezoelectric pumps, various kinds of the prototypes had been designed and fabricated to discover the relationship between the performance and the structural parameters of valve hole spacing. The prototype is comprised of a piezoelectric actuator and a pump chamber through a conical tube that connects the pump chamber with the buffer chamber. First, the flow characteristics of the valve-less pump were performed by using COMSOL Multiphysics. According to the simulation result, the decline of flow velocity around the valve holes on the side far from the center of the pump chamber may be the reasons for the performance degradation. Second, the effect of valve hole spacing on the prototype was investigated with respect to several parameters, such as the chamber height and cone angle. The experimental results indicated that the valve-less piezoelectric pump output flowrate can be improved by reducing spacing valve hole spacing. A maximum flowrate of 8.43mL/min was achieved at valve hole spacing of 3 mm, which is 13.6% and 47.1% higher than that at 15 mm and 25 mm, respectively. We finally verify the feasibility of improving the capacity of valve-less piezoelectric pumps by reducing valve hole spacing. INDEX TERMS Valve hole spacing, valve-less piezoelectric pump, output flowrate.

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