A New Concept of Optical Encoder Displacement Sensors: Gray Encoding Patterns and a Curve Fitting Method

Fu, Yeh Fen; Shyu, L.H.; Chen, Y.T.; Jywe, Wen-Yuh; Liu, Chien-Hung

doi:10.4028/0-87849-990-3.349

Cited by 1 publication

(1 citation statement)

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“…To solve above problems, Y.F. Fu et al proposed a technique based on a linear optical detector array to acquire continuously varying signals that the orthogonal property and the high SNR can be preserved using the statistical correlation of signals, and these have been verified experimentally [5]. Other method based on single frequency interferometer and nonlinear signal compensation technique is proposed [6], which can achieve high accuracy; however, the signal preprocessing is complicated and slowly.…”

Section: Introductionmentioning

confidence: 99%

A Compact Signal Processing with Position Sensitive Detectors Utilized for Michelson Interferometer

Shyu

Wang

Lin

2010

KEM

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Interferometric signals of a homodyne Michelson interferometer appear in sinusoidal forms. In this investigation, new concepts for signal processing of Michelson interferometer are demonstrated. With the utilization of detection of position sensitive detector (PSD) and by the procedure of differential signals and the characteristic of symmetric waveform, a compact signal processing for homodyne Michelson interferometer has been developed. Its advantages include simplified procedure, fast processing and few electronic hardware. For experiment tests of the signal processing, a conventional homodyne Michelson interferometer has been constructed. Major components of the interferometer consist of laser light source, beam splitter, mirrors, PSD and piezo transducer for driving measurement mirror. To verify the performance of the signal processing, a commercial nanopositioning stage as reference standard has been utilized for comparison measurements. Through theoretical analysis and experiment tests, it can be proved that by the developed signal processing an interferometer possesses the optical resolution of 79 nm. With support of the developed signal processing, interferometers will possess the benefits of simply structure, few components and lower cost.

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Section: Introductionmentioning

confidence: 99%