In this paper, we will investigate SILC effects on the reliability of E 2 PROM memories. Particularly, we will analyze the influence on the retention properties of E 2 PROM memory devices of Program/Erase number of cycles and bias conditions, oxide thickness scaling and quality, and storage field. To accomplish this task, we will use a recently proposed compact E 2 PROM model, which has been extended to include the Stress-Induced Leakage Current (SILC), thus bridging the gap between the oxide quality characterization activity performed on MOS transistors and capacitors, and the actual impact of SILC on the functioning of E 2 PROM memories.