A new broad-band method for magnetic thin-film characterization in the microwave range

Vincent, Didier; Rouiller, T.; Simovsky, C.R.; Bayard, Bernard; Noyel, G.

doi:10.1109/tmtt.2005.845730

Cited by 28 publications

(13 citation statements)

References 18 publications

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“…Thin and thick layers of YIG have been used in our Laboratory to study different integrated passive components [3][4][5][6]. While studying these devices, we have encountered several mechanical and electrical problems: cracks, detachment of YIG or Cu films from the substrate, deterioration of Cu films, open or short circuit.…”

Section: Resultsmentioning

confidence: 99%

“…The characterization of these films is of great interests in magneto-optics, microwaves and radiofrequency domains. They are used in our Laboratory for the miniaturization of magnetic devices as planar inductors and transformers [1][2][3] and also for the integration of microwaves passive components like resonators, isolators and circulators [4][5][6].…”

Section: Introductionmentioning

confidence: 99%

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Influence of annealing in vacuum and in air on magnetic, crystallographic and morphological properties of thin YIG films

Siblini

Khalil

Chatelon

et al. 2013

EPJ Web of Conferences

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Abstract. The Yttrium Iron Garnet (YIG) is chosen by our laboratory for the integration of passive components in the microwaves domain and for the miniaturization of integrated inductors and transformers. Magnetic and morphological characterizations are essential for the development of these components. To fabricate a micro-inductor of solenoid type, we have deposited on an alumina substrate, by RF sputtering, a thin YIG film between two layers of copper. We have also used the photolithography technique in a clean room to obtain the desired pattern of the coil. The YIG films are amorphous after deposition, the annealing at 740°C for 2 hours is necessary for them to be crystallized and to have magnetic properties. To avoid the deterioration of copper layers, the Classical Thermal Annealing (CTA) was replaced by a Vacuum Thermal Annealing (VTA). Before manufacturing the integrated inductor, it is interesting to do the magnetic, crystallographic and morphological characterizations of YIG films after annealing with both techniques of thermal treatment. To check the quality of the prototype, we have done different characterizations: VSM, Kerr effect, XRD, SEM. The results obtained with VTA were better than of CTA comparing them with bulk YIG properties.

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Section: Resultsmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Influence of annealing in vacuum and in air on magnetic, crystallographic and morphological properties of thin YIG films

Siblini

Khalil

Chatelon

et al. 2013

EPJ Web of Conferences

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“…The magnetostatic and microwave (X-band) properties of this ferrite include a saturation magnetization μ 0 M s = 0.4 T, a relative permittivity of ε r = 14.6, a loss tangent 4.24×10 −3 . The damping factor α is found to be around 0.35 by measuring a conventional coplanar waveguide (CPW) transmission line on ESL 40012 [13]. Hence, the line width H equals 250 Oe according to [14, eq.…”

Section: A Y-junction Edge-guided Circulator Designmentioning

confidence: 99%

Study of a Ferrite LTCC Multifunctional Circulator With Integrated Winding

Vincent

Bray

Roy

2015

IEEE Trans. Compon., Packag. Manufact. Technol.

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“…For soft magnetic materials, coaxial line perturbation method has good performance [3,4]. Whereas for the magnetic thin films deposited on rigid substrate, the planar transmission-lines, such as coplanar waveguide [5][6][7] and microstrip [8][9][10][11][12], are more suitable. The reason is that the thin film materials can be easily loaded in the measurement fixture.…”

Section: Introductionmentioning

confidence: 99%

Measuring Complex Permeability of Ferromagnetic Thin Films using Microstrip Transmission Method

Tang

et al. 2009

Journal of Electromagnetic Waves and Applications

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A transmission method is proposed to measure the complex permeability of ferromagnetic thin films in the frequency range of 100 MHz-18 GHz. The air microstrip is used as measurement fixture; S-parameters are measured by vector network analyzer (VNA). Ferromagnetic thin film samples deposited on silicon substrate with thickness less than 90 nm are measured. Effective permeability is deduced from the s-parameters loaded with and without thin films, and complex permeability of thin films is extracted from the effective permeability. The experimental results show that, using the method proposed in this paper, the complex permeability of thin films can be determined accurately up to 18 GHz.

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A new broad-band method for magnetic thin-film characterization in the microwave range

Cited by 28 publications

References 18 publications

Influence of annealing in vacuum and in air on magnetic, crystallographic and morphological properties of thin YIG films

Influence of annealing in vacuum and in air on magnetic, crystallographic and morphological properties of thin YIG films

Study of a Ferrite LTCC Multifunctional Circulator With Integrated Winding

Measuring Complex Permeability of Ferromagnetic Thin Films using Microstrip Transmission Method

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