A new accelerated transfer method for the CPD image sensor

Experimental and simulation studies of thermal flow of borophosphosilicate and phosphosilicate glassesA new fabrication process for solid-state imagers based on the borophosphosilicate glass (BPSG) flow has been developed. It was found that wen-designed tapered steps can be obtained even at low temperatures with the use of BPSG, which can be cleaned in a hot NH 4 0H!H 2 0 2 iH 2 0 solution.As a result, a solid-state imager fabricated using the above process is characterized by satisfactory shapes of tapered steps made of intermediate oxide which give complete metal interconnect lines.

show abstract

Borophosphosilicate glass flow for solid-state imager application

Susa

Hiroshima

Senda

et al. 1985

Journal of Applied Physics

View full text Add to dashboard Cite

show abstract

scite is a Brooklyn-based organization that helps researchers better discover and understand research articles through Smart Citations–citations that display the context of the citation and describe whether the article provides supporting or contrasting evidence. scite is used by students and researchers from around the world and is funded in part by the National Science Foundation and the National Institute on Drug Abuse of the National Institutes of Health.

Contact Info

hi@scite.ai

10624 S. Eastern Ave., Ste. A-614

Henderson, NV 89052, USA

Blog Terms and Conditions API Terms Privacy Policy Contact Cookie Preferences Do Not Sell or Share My Personal Information

Made with 💙 for researchers

Part of the Research Solutions Family.

A new accelerated transfer method for the CPD image sensor

Cited by 1 publication

References 6 publications

Borophosphosilicate glass flow for solid-state imager application

Borophosphosilicate glass flow for solid-state imager application

Contact Info

Product

Resources

About