A new a-Si TFT with Al/sub 2/O/sub 3//SiN double-layered gate insulator for 10.4-inch diagonal multicolor display

Abstract

A new a-Si TFT(Thin Film '&insistor) with an A1 gate electrode and an A1 0 / SiN double-layered gate insulater has been developed, and this TFT has been successfully applied to the 10.4-inch diagonal multicolor display panel. A1 is a low resistivity metal and it is also possible to form Alz O 3 by anodic oxidation.These features contribute greatly to decreasing the number of defects in the panel and are indispensable for manufacturing large -size display. The Al. which is used as a gate electrode, can also be used as a gate bus-line metal. As a result, the gate bus -line resistance of the panel can be reduced to about 2 KQ and this is quite effective to improve the image quality of the panel.

Application of the low dielectric methyl-silsesquiazane (MSZ) as a passivation layer on TFT-LCD

“…Recently, inverted-staggered back-channel-etched (BCE) hydrogenated amorphous silicon (a-Si:H) thin-film transistors (TFT) have been used as a switching element in active matrix liquid-crystal displays (AM-LCD's) [1,2]. Much progress has been made to improve the performance and the throughput of the fabrication.…”

Investigation of the low dielectric siloxane-based hydrogen silsesquioxane (HSQ) as passivation layer on TFT-LCD

“…Inverted-staggered back-channel-etched (BCE) hydrogenated amorphous silicon thin-film transistors (a-Si:H TFTs) have been used as the switching devices in active matrix liquid crystal displays (LCDs) [1,2]. With larger displays, performance requirements of TFT devices become even more demanding.…”

Improvement of Hydrogenated Amorphous-Silicon TFT Performances With Low-$k$Siloxane-Based Hydrogen Silsesquioxane (HSQ) Passivation Layer

“…T HE inverted-staggered back-channel-etched (BCE) hydrogenated amorphous-silicon (a-Si : H) thin-film transistor (TFT) has been widely used as a switching element in activematrix liquid-crystal displays (AM-LCDs) [1], [2]. The issues of transmittance and RC time delay become more and more critical as the panel size becomes larger, and the resolution and brightness requirements of TFT-LCDs become higher [3]- [5].…”