2006
DOI: 10.1016/j.apsusc.2005.12.078
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A nanoindentation study of the mechanical properties of ZnO thin films on (0 0 0 1) sapphire

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Cited by 37 publications
(16 citation statements)
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“…The other layers which make up the thin film region, ZnO and Al, were either too thin or too close to the edge to give consistent results. However, since ZnO has similar mechanical properties to SnO 2 [39] and Al is a soft metal, it is assumed that these layers would also deform plastically under similar conditions.…”
Section: Discussionmentioning
confidence: 99%
“…The other layers which make up the thin film region, ZnO and Al, were either too thin or too close to the edge to give consistent results. However, since ZnO has similar mechanical properties to SnO 2 [39] and Al is a soft metal, it is assumed that these layers would also deform plastically under similar conditions.…”
Section: Discussionmentioning
confidence: 99%
“…[17] 154 ± 5 GPa [17] ZnO films/a-sapphire 11.5 ± 0.8 GPa [18] 212.2 ± 0.1 GPa [18] 6.6 ± 1.2 GPa [14] 318.2 ± 50 GPa [14] ZnO films/c-sapphire 7.4 ± 0.1 GPa [18] 150.1 ± 5.7 GPa [18] 5.7 ± 0.8 GPa [14] 310.1 ± 40 GPa [14] ZnOfilms/(0 0 0 1)6H-SiC 5.9 ± 0.2 GPa [18] 117.1 ± 0.4 GPa [18] ZnO nanobelts ∼2.5 GPa [19] 31.1 ± 1.3 GPa [19] * The present study.…”
Section: Hardness (Gpa)mentioning
confidence: 97%
“…2,5,7,8 On the other hand, others have found that glassy polymers such as thermoset epoxy resins or poly(methyl methacrylate) (PMMA) do not exhibit this effect. Many studies have examined the effects of tip radius and geometry on the mechanical properties [12][13][14][15] but not the effect of the dynamic oscillation on the mechanical properties. 5 On the positive side, other properties such as fatigue and creep can also be studied using dynamic loading.…”
Section: Introductionmentioning
confidence: 99%