A nanoindentation study of copper films on oxidised silicon substrates

Beegan, D.; Chowdhury, S.; Laugier, M. T.

doi:10.1016/s0257-8972(03)00774-6

Cited by 83 publications

(49 citation statements)

References 17 publications

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“…The Vickers hardness values obtained from equation (1) are reported in Table II The micro-hardness test was the Vickers type, which consists of doing a , on the order of micrometres, on the surface of the material; with an indenter that has the shape e square base straight pyramid. The Vickers hardness is obtained by measuring the diagonal of ecorded footprint and using the equation (1) [16], [17].…”

Section: Resultsmentioning

confidence: 99%

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Temperature behaviour on deposition of the titanium nitride thin films on the H13 steel by the electric arc discharge in vacuum

et al. 2017

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Comportamiento de la temperatura en la deposición de películas delgadas de nitruro de titanio sobre acero H13 mediante la descarga de arco eléctrico en vacíoComportamento da temperatura na deposição dos filmes delgados de nitreto de titânio sobre el acero H13 mediante la descarga de arco elétrico no vácuo ResumenObjetivo: En el presente trabajo de investigación se estudia el comportamiento de la temperatura del sustrato, fabricado en acero de tipo AISI H13, en el rango de y , durante la deposición superficial de películas delgadas de nitruro de titanio (TiN) por la técnica de arco catódico en vacío. Resultados: Las propiedades físicas de las películas de TiN fueron obtenidas y analizadas mediante las técnicas la micro-indentación, microscopía de fuerza atómica (AFM) y la difracción de rayos x (DRX). Conclusión: Se determinó que el incremento en la temperatura del sustrato durante la deposición de las películas de TiN, mejora las propiedades mecánicas de la superficie del acero de tipo AISI H13, donde la mayor dureza se presentó en el recubrimiento depositado a una temperatura de , el cual tiene una orientación preferencial en el plano determinada por los patrones de DRX. técnicas de micro-indentação, microscopia de força atómica (AFM) e difracção de raios-X (DRX). Conclusão: determinou-se que o aumento de temperatura do substrato durante a deposição do filme de TiN, melhora as propriedades mecânicas da superfície do aço de tipo AISI H13, onde a maior dureza foi apresentada no revestimento depositado a uma temperatura de , que tem uma orientação preferida no plano determinados pelos padrões de DRX.

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Section: Resultsmentioning

confidence: 99%

“…PP: [14][15][16][17][18][19][20][21][22] Temperature behaviour on deposition of the titanium nitride thin films on the H13 steel by the electric arc discharge in vacuum…”

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confidence: 99%

Temperature behaviour on deposition of the titanium nitride thin films on the H13 steel by the electric arc discharge in vacuum

et al. 2017

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“…Imaging can be performed with the same tool right after the indentation, without resetting the sample. Furthermore, AFM can detect pile-up or sink-in effects, which conventional indenters cannot [52][53][54].…”

Section: Nanoindentationmentioning

confidence: 99%

Nanoindentation as a Tool to Clarify the Mechanism Causing Variable Stiffness of a Silane Layer on Diamond

Shcherbakova¹,

Hatakeyama²,

Amemiya³

et al. 2012

Nanoindentation in Materials Science

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“…The mechanical properties of bulk silicon are generally evaluated by means of nanoindentation tests, in which the specimens are first loaded to a maximum force or depth, and are then unloaded. The hardness and Young's properties of the indented specimens are obtained from the resulting load-depth curves using either the Oliver-Pharr method 3,4) or the work-of-indentation method. 5,6) Many studies have shown that a discontinuity ("pop-in") event commonly occurs in the loading curve, while another discontinuity ("elbow" or "pop-out") event often occurs in the unloading curve.…”

Section: Introductionmentioning

confidence: 99%

Load Dependence of Nanoindentation Behaviour and Phase Transformation of Annealed Single-Crystal Silicon

Lee

Chang

2015

Mater. Trans.

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The nanoindentation behaviour and phase transformation of annealed single-crystal silicon wafers were examined. The silicon specimens were annealed at temperatures of 250, 350 and 450°C, respectively, for 15 min and were then indented to maximum loads of 30, 50 and 70 mN. The phase changes induced in the indented specimens were observed using transmission electron microscopy (TEM) and micro-Raman scattering spectroscopy (RSS). For all annealing temperatures, an elbow feature was observed in the unloading curve following indentation to a maximum load of 30 mN. Under higher loads of 50 mN and 70 mN, respectively, the elbow feature was replaced by a pop-out event. The elbow feature reveals a complete amorphous phase transformation within the indented zone, whereas the pop-out event indicates the formation of crystalline Si XII and Si III phases. The formation of these phases increased with an increasing annealing temperature and indentation load. Moreover, the hardness and Young's modulus both decreased as the annealing temperature and indentation load increased. For the specimens annealed at 450°C and then indented to maximum loads of 50 mN and 70 mN, respectively, micro-cracks initiated at the bottom of the phase transformation region and extended into the silicon substrate. In other words, under high annealing temperatures and indentation loads, the critical load required for micro-fracture initiation was exceeded.

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A nanoindentation study of copper films on oxidised silicon substrates

Cited by 83 publications

References 17 publications

Temperature behaviour on deposition of the titanium nitride thin films on the H13 steel by the electric arc discharge in vacuum

Temperature behaviour on deposition of the titanium nitride thin films on the H13 steel by the electric arc discharge in vacuum

Nanoindentation as a Tool to Clarify the Mechanism Causing Variable Stiffness of a Silane Layer on Diamond

Load Dependence of Nanoindentation Behaviour and Phase Transformation of Annealed Single-Crystal Silicon

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