2022
DOI: 10.1038/s41378-022-00372-4
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A nanoforest-based humidity sensor for respiration monitoring

Abstract: Traditional humidity sensors for respiration monitoring applications have faced technical challenges, including low sensitivity, long recovery times, high parasitic capacitance and uncalibrated temperature drift. To overcome these problems, we present a triple-layer humidity sensor that comprises a nanoforest-based sensing capacitor, a thermistor, a microheater and a reference capacitor. When compared with traditional polyimide-based humidity sensors, this novel device has a sensitivity that is improved signif… Show more

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Cited by 33 publications
(10 citation statements)
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References 42 publications
(25 reference statements)
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“…From a practical point of view, spiky coatings have recently drown significant attention due to the rapid progress in fabrication technology and favorable performance in many applications such as superhydrophobic materials [76], filtration [77,78], sensing systems [79][80][81], selective protein separation [82], to name but a few. At the same time, a theoretical description of their trapping efficiency was still missing, especially in a transient timedependent regime.…”
Section: Discussionmentioning
confidence: 99%
“…From a practical point of view, spiky coatings have recently drown significant attention due to the rapid progress in fabrication technology and favorable performance in many applications such as superhydrophobic materials [76], filtration [77,78], sensing systems [79][80][81], selective protein separation [82], to name but a few. At the same time, a theoretical description of their trapping efficiency was still missing, especially in a transient timedependent regime.…”
Section: Discussionmentioning
confidence: 99%
“…Humidity sensors also play a vital role in human respiratory monitoring. Several diseases such as asthma [8], bronchitis [9], heart disease [10], sleep apnea syndrome (SAS) [11], and pneumonia [12] can be monitored by the changes in respiratory rate and depth.…”
Section: Introductionmentioning
confidence: 99%
“…To let the users feel comfortable when using the wearable breath monitor, it is important to develop sensors with ultrathin film and high flexibility. Moreover, continuous respiratory monitoring is one of the important parts to detect several types of heart and respiratory diseases [8][9][10][11][12]. Furthermore, breath analysis is also an important tool to detect various kinds of cancer such as that of the lung, breast, prostate, and colorectal [13][14][15][16].…”
Section: Introductionmentioning
confidence: 99%
“…Humidity is an interrelated component of human society and plays an important role in industrial production and daily life such as in textile treatment, food preservation, and health maintenance. , To monitor humidity, various types of humidity-responsive systems have been developed for different applications. Semiconductor sensors, with a short response time and strong compatibility, are widely used in daily life to conduct relative humidity measurements and can be easily incorporated within a highly integrated intelligent humidity sensor system. Nevertheless, this equipment suffers from complex fabrication, high weight, and the inevitable need for an external power supply. With the development of material science, the determination of humidity through changes in color that can be directly observed by the naked eye has also been attracting increasing attention.…”
Section: Introductionmentioning
confidence: 99%